JPS52130682U - - Google Patents
Info
- Publication number
- JPS52130682U JPS52130682U JP3927976U JP3927976U JPS52130682U JP S52130682 U JPS52130682 U JP S52130682U JP 3927976 U JP3927976 U JP 3927976U JP 3927976 U JP3927976 U JP 3927976U JP S52130682 U JPS52130682 U JP S52130682U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3927976U JPS52130682U (cs) | 1976-03-31 | 1976-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3927976U JPS52130682U (cs) | 1976-03-31 | 1976-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52130682U true JPS52130682U (cs) | 1977-10-04 |
Family
ID=28498448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3927976U Pending JPS52130682U (cs) | 1976-03-31 | 1976-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52130682U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024157484A1 (ja) * | 2023-01-27 | 2024-08-02 | ギガフォトン株式会社 | ガスレーザ装置用放電チャンバ、及び電子デバイスの製造方法 |
-
1976
- 1976-03-31 JP JP3927976U patent/JPS52130682U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024157484A1 (ja) * | 2023-01-27 | 2024-08-02 | ギガフォトン株式会社 | ガスレーザ装置用放電チャンバ、及び電子デバイスの製造方法 |