JPS52141168A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS52141168A
JPS52141168A JP5763476A JP5763476A JPS52141168A JP S52141168 A JPS52141168 A JP S52141168A JP 5763476 A JP5763476 A JP 5763476A JP 5763476 A JP5763476 A JP 5763476A JP S52141168 A JPS52141168 A JP S52141168A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
scanning
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5763476A
Other languages
Japanese (ja)
Other versions
JPS589546B2 (en
Inventor
Hiroshi Matsuda
Takeshi Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP51057634A priority Critical patent/JPS589546B2/en
Publication of JPS52141168A publication Critical patent/JPS52141168A/en
Publication of JPS589546B2 publication Critical patent/JPS589546B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP51057634A 1976-05-19 1976-05-19 scanning electron microscope Expired JPS589546B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51057634A JPS589546B2 (en) 1976-05-19 1976-05-19 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51057634A JPS589546B2 (en) 1976-05-19 1976-05-19 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS52141168A true JPS52141168A (en) 1977-11-25
JPS589546B2 JPS589546B2 (en) 1983-02-21

Family

ID=13061315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51057634A Expired JPS589546B2 (en) 1976-05-19 1976-05-19 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS589546B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019538A (en) * 1997-03-27 1998-01-23 Hitachi Ltd Electron beam defect inspection method and apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4721345A (en) * 1971-03-13 1972-10-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4721345A (en) * 1971-03-13 1972-10-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1019538A (en) * 1997-03-27 1998-01-23 Hitachi Ltd Electron beam defect inspection method and apparatus

Also Published As

Publication number Publication date
JPS589546B2 (en) 1983-02-21

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