JPS52149238A - Chemical etching solution for semiiconductors - Google Patents

Chemical etching solution for semiiconductors

Info

Publication number
JPS52149238A
JPS52149238A JP6700776A JP6700776A JPS52149238A JP S52149238 A JPS52149238 A JP S52149238A JP 6700776 A JP6700776 A JP 6700776A JP 6700776 A JP6700776 A JP 6700776A JP S52149238 A JPS52149238 A JP S52149238A
Authority
JP
Japan
Prior art keywords
semiiconductors
etching solution
chemical etching
chemical
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6700776A
Other languages
Japanese (ja)
Inventor
Motoki Kondou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP6700776A priority Critical patent/JPS52149238A/en
Publication of JPS52149238A publication Critical patent/JPS52149238A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP6700776A 1976-06-07 1976-06-07 Chemical etching solution for semiiconductors Pending JPS52149238A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6700776A JPS52149238A (en) 1976-06-07 1976-06-07 Chemical etching solution for semiiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6700776A JPS52149238A (en) 1976-06-07 1976-06-07 Chemical etching solution for semiiconductors

Publications (1)

Publication Number Publication Date
JPS52149238A true JPS52149238A (en) 1977-12-12

Family

ID=13332425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6700776A Pending JPS52149238A (en) 1976-06-07 1976-06-07 Chemical etching solution for semiiconductors

Country Status (1)

Country Link
JP (1) JPS52149238A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002363775A (en) * 2001-05-31 2002-12-18 Disco Abrasive Syst Ltd Etching method and etching system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002363775A (en) * 2001-05-31 2002-12-18 Disco Abrasive Syst Ltd Etching method and etching system

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