JPS52149588A - Valve control device - Google Patents

Valve control device

Info

Publication number
JPS52149588A
JPS52149588A JP6559376A JP6559376A JPS52149588A JP S52149588 A JPS52149588 A JP S52149588A JP 6559376 A JP6559376 A JP 6559376A JP 6559376 A JP6559376 A JP 6559376A JP S52149588 A JPS52149588 A JP S52149588A
Authority
JP
Japan
Prior art keywords
control device
valve control
valves
employing
highly accurately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6559376A
Other languages
Japanese (ja)
Other versions
JPS5810627B2 (en
Inventor
Saburo Hoshino
Katsuo Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6559376A priority Critical patent/JPS5810627B2/en
Publication of JPS52149588A publication Critical patent/JPS52149588A/en
Publication of JPS5810627B2 publication Critical patent/JPS5810627B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)

Abstract

PURPOSE: Valve control device which can control the process highly accurately by employing two valves.
COPYRIGHT: (C)1977,JPO&Japio
JP6559376A 1976-06-07 1976-06-07 valve control device Expired JPS5810627B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6559376A JPS5810627B2 (en) 1976-06-07 1976-06-07 valve control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6559376A JPS5810627B2 (en) 1976-06-07 1976-06-07 valve control device

Publications (2)

Publication Number Publication Date
JPS52149588A true JPS52149588A (en) 1977-12-12
JPS5810627B2 JPS5810627B2 (en) 1983-02-26

Family

ID=13291458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6559376A Expired JPS5810627B2 (en) 1976-06-07 1976-06-07 valve control device

Country Status (1)

Country Link
JP (1) JPS5810627B2 (en)

Also Published As

Publication number Publication date
JPS5810627B2 (en) 1983-02-26

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