JPS52150975A - X-ray transfer apparatus - Google Patents

X-ray transfer apparatus

Info

Publication number
JPS52150975A
JPS52150975A JP6769276A JP6769276A JPS52150975A JP S52150975 A JPS52150975 A JP S52150975A JP 6769276 A JP6769276 A JP 6769276A JP 6769276 A JP6769276 A JP 6769276A JP S52150975 A JPS52150975 A JP S52150975A
Authority
JP
Japan
Prior art keywords
transfer apparatus
ray transfer
ray
wafer
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6769276A
Other languages
Japanese (ja)
Inventor
Kayao Takemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6769276A priority Critical patent/JPS52150975A/en
Publication of JPS52150975A publication Critical patent/JPS52150975A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To perform transfer by using a static target which does not cause vibrations, and placing a mask and wafer in atmosphere.
COPYRIGHT: (C)1977,JPO&Japio
JP6769276A 1976-06-11 1976-06-11 X-ray transfer apparatus Pending JPS52150975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6769276A JPS52150975A (en) 1976-06-11 1976-06-11 X-ray transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6769276A JPS52150975A (en) 1976-06-11 1976-06-11 X-ray transfer apparatus

Publications (1)

Publication Number Publication Date
JPS52150975A true JPS52150975A (en) 1977-12-15

Family

ID=13352269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6769276A Pending JPS52150975A (en) 1976-06-11 1976-06-11 X-ray transfer apparatus

Country Status (1)

Country Link
JP (1) JPS52150975A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690523A (en) * 1979-12-25 1981-07-22 Fujitsu Ltd Pattern transcription
JPS59188121A (en) * 1983-04-08 1984-10-25 Fuji Photo Film Co Ltd X-ray transfer device
JPS62281326A (en) * 1986-05-29 1987-12-07 Matsushita Electric Ind Co Ltd X-ray irradiation unit and method of applying x-ray

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690523A (en) * 1979-12-25 1981-07-22 Fujitsu Ltd Pattern transcription
JPS59188121A (en) * 1983-04-08 1984-10-25 Fuji Photo Film Co Ltd X-ray transfer device
JPS62281326A (en) * 1986-05-29 1987-12-07 Matsushita Electric Ind Co Ltd X-ray irradiation unit and method of applying x-ray

Similar Documents

Publication Publication Date Title
JPS51111076A (en) Exposure device
JPS5222578A (en) Stabilizing agent for organic materials
JPS51131389A (en) Device for uniform polarized magnetic field
JPS51120180A (en) Pattern printing device
JPS52150975A (en) X-ray transfer apparatus
JPS51130743A (en) Wave-energy application device
JPS51126073A (en) Pattern printing equpment made available by photo-etching method
JPS51113572A (en) Centering method for electronic ray picture and the unit using the sai d method
JPS5250481A (en) Air cylinder
JPS51144053A (en) Duct penetrating through radioactive atmosphere
JPS5223565A (en) Atmosphere gas purification apparatus
JPS51120178A (en) Scanning type mask detector
JPS5216171A (en) Mask fitting device
JPS52106681A (en) Etching method
JPS5276879A (en) Counting device for number of exposure times of electron beam exposure device
JPS51124735A (en) A control apparatus for the fuel amount control apparatus
JPS51140944A (en) An automatic marking apparatus
JPS51115048A (en) Soft water preparing apparatus
JPS526537A (en) Doctor device for magnetic brush developing system
JPS51140482A (en) Device for printing wafer index
JPS51129253A (en) Auto-observation method of x-ray photo film and the device
JPS5316631A (en) Photographic exposure method
JPS51140571A (en) Method for forming a semiconductor protective film
JPS52149761A (en) Auxiliary device for hoop apply, hoop removal tie supply and tie removal
JPS5229993A (en) Vibration-proof type porcelain apparatus