JPS52156376A - Method of producing thin film pattern - Google Patents

Method of producing thin film pattern

Info

Publication number
JPS52156376A
JPS52156376A JP7399276A JP7399276A JPS52156376A JP S52156376 A JPS52156376 A JP S52156376A JP 7399276 A JP7399276 A JP 7399276A JP 7399276 A JP7399276 A JP 7399276A JP S52156376 A JPS52156376 A JP S52156376A
Authority
JP
Japan
Prior art keywords
thin film
film pattern
producing thin
producing
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7399276A
Other languages
Japanese (ja)
Other versions
JPS5951157B2 (en
Inventor
Masaaki Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP51073992A priority Critical patent/JPS5951157B2/en
Publication of JPS52156376A publication Critical patent/JPS52156376A/en
Publication of JPS5951157B2 publication Critical patent/JPS5951157B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP51073992A 1976-06-23 1976-06-23 Manufacturing method of thin film pattern Expired JPS5951157B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51073992A JPS5951157B2 (en) 1976-06-23 1976-06-23 Manufacturing method of thin film pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51073992A JPS5951157B2 (en) 1976-06-23 1976-06-23 Manufacturing method of thin film pattern

Publications (2)

Publication Number Publication Date
JPS52156376A true JPS52156376A (en) 1977-12-26
JPS5951157B2 JPS5951157B2 (en) 1984-12-12

Family

ID=13534112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51073992A Expired JPS5951157B2 (en) 1976-06-23 1976-06-23 Manufacturing method of thin film pattern

Country Status (1)

Country Link
JP (1) JPS5951157B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6223943U (en) * 1985-07-29 1987-02-13

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49769A (en) * 1972-04-19 1974-01-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49769A (en) * 1972-04-19 1974-01-07

Also Published As

Publication number Publication date
JPS5951157B2 (en) 1984-12-12

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