JPS52177A - Prober - Google Patents

Prober

Info

Publication number
JPS52177A
JPS52177A JP7556875A JP7556875A JPS52177A JP S52177 A JPS52177 A JP S52177A JP 7556875 A JP7556875 A JP 7556875A JP 7556875 A JP7556875 A JP 7556875A JP S52177 A JPS52177 A JP S52177A
Authority
JP
Japan
Prior art keywords
needle
prober
checked
supporting
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7556875A
Other languages
Japanese (ja)
Inventor
Michio Okamoto
Hisashi Yoshida
Masaru Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7556875A priority Critical patent/JPS52177A/en
Publication of JPS52177A publication Critical patent/JPS52177A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To provide adjustable contacting degree of inspection needle contacted with a part to be checked in predetermined pressure range by supporting the needle at the ends of leaf springs of a pair provided in parallel with each other.
COPYRIGHT: (C)1977,JPO&Japio
JP7556875A 1975-06-23 1975-06-23 Prober Pending JPS52177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7556875A JPS52177A (en) 1975-06-23 1975-06-23 Prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7556875A JPS52177A (en) 1975-06-23 1975-06-23 Prober

Publications (1)

Publication Number Publication Date
JPS52177A true JPS52177A (en) 1977-01-05

Family

ID=13579902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7556875A Pending JPS52177A (en) 1975-06-23 1975-06-23 Prober

Country Status (1)

Country Link
JP (1) JPS52177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0362938A (en) * 1989-07-31 1991-03-19 Tokyo Electron Ltd Inspection apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0362938A (en) * 1989-07-31 1991-03-19 Tokyo Electron Ltd Inspection apparatus

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