JPS5221764A - Scattering electron checking diaphragm - Google Patents

Scattering electron checking diaphragm

Info

Publication number
JPS5221764A
JPS5221764A JP50097593A JP9759375A JPS5221764A JP S5221764 A JPS5221764 A JP S5221764A JP 50097593 A JP50097593 A JP 50097593A JP 9759375 A JP9759375 A JP 9759375A JP S5221764 A JPS5221764 A JP S5221764A
Authority
JP
Japan
Prior art keywords
diaphragm
checking
scattering electron
scattering
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50097593A
Other languages
English (en)
Inventor
Shigeto Sunakozawa
Minoru Shinohara
Moriki Kubozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50097593A priority Critical patent/JPS5221764A/ja
Publication of JPS5221764A publication Critical patent/JPS5221764A/ja
Pending legal-status Critical Current

Links

JP50097593A 1975-08-13 1975-08-13 Scattering electron checking diaphragm Pending JPS5221764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50097593A JPS5221764A (en) 1975-08-13 1975-08-13 Scattering electron checking diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50097593A JPS5221764A (en) 1975-08-13 1975-08-13 Scattering electron checking diaphragm

Publications (1)

Publication Number Publication Date
JPS5221764A true JPS5221764A (en) 1977-02-18

Family

ID=14196523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50097593A Pending JPS5221764A (en) 1975-08-13 1975-08-13 Scattering electron checking diaphragm

Country Status (1)

Country Link
JP (1) JPS5221764A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588891A (en) * 1983-04-04 1986-05-13 Hitachi, Ltd. Scanning type electron microscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718715U (ja) * 1971-04-02 1972-11-01
JPS4966060A (ja) * 1972-10-30 1974-06-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718715U (ja) * 1971-04-02 1972-11-01
JPS4966060A (ja) * 1972-10-30 1974-06-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588891A (en) * 1983-04-04 1986-05-13 Hitachi, Ltd. Scanning type electron microscope

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