JPS5224683B1 - - Google Patents

Info

Publication number: JPS5224683B1
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP46051503A

Other languages

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1970-07-15

Filing date

1971-07-13

Publication date

1977-07-02

1971-07-13 Application filed filed Critical

1977-07-02 Publication of JPS5224683B1 publication Critical patent/JPS5224683B1/ja

Status Pending legal-status Critical Current

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F04D29/544—Blade shapes

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Geometry (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

JP46051503A 1970-07-15 1971-07-13 Pending JPS5224683B1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2035063A DE2035063C3 (de)	1970-07-15	1970-07-15	Laufrad für eine Turbomolekularpumpe

Publications (1)

Publication Number	Publication Date
JPS5224683B1 true JPS5224683B1 (de)	1977-07-02

Family

ID=5776829

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP46051503A Pending JPS5224683B1 (de)	1970-07-15	1971-07-13

Country Status (10)

Country	Link
US (1)	US3748055A (de)
JP (1)	JPS5224683B1 (de)
BE (1)	BE769932A (de)
CA (1)	CA950872A (de)
CH (1)	CH529927A (de)
DE (1)	DE2035063C3 (de)
FR (1)	FR2097945A5 (de)
GB (1)	GB1308263A (de)
NL (1)	NL157387B (de)
SE (1)	SE371867B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2005264932A (ja) *	2004-03-16	2005-09-29	Pfeiffer Vacuum Gmbh	ターボ分子ポンプおよびそのディスクの製造方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2229724B2 (de) *	1972-06-19	1980-06-04	Leybold-Heraeus Gmbh, 5000 Koeln	Turbomolekularpumpe
DE2554995A1 (de) *	1975-12-06	1977-06-16	Pfeiffer Vakuumtechnik	Turbomolekularpumpe
DE3317868A1 (de) *	1983-05-17	1984-11-22	Leybold-Heraeus GmbH, 5000 Köln	Reibungspumpe
DE3507274A1 (de) *	1985-03-01	1986-09-04	Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar	Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
WO1989008192A1 (fr) *	1988-02-26	1989-09-08	Nikolai Mikhailovich Novikov	Pompe a vide turbomoleculaire
IT1238201B (it) *	1989-11-03	1993-07-09	Varian Spa	Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE10052637B4 (de) *	2000-10-24	2021-03-11	Pfeiffer Vacuum Gmbh	16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10203648B4 (de) *	2001-02-10	2016-05-25	Pfeiffer Vacuum Gmbh	Rotor-und Statorscheiben für eine Turbomolekularpumpe
EP1249613B1 (de) *	2001-03-15	2004-01-28	VARIAN S.p.A.	Turbinenpumpe mit einer Statorstufe integriert mit einem Distanzring
DE102008056352A1 (de) *	2008-11-07	2010-05-12	Oerlikon Leybold Vacuum Gmbh	Vakuumpumpenrotor
CN105179021B (zh) *	2014-09-11	2018-04-10	摩尔动力(北京)技术股份有限公司	对转叶轮机构及包括其的装置
WO2016050006A1 (zh) *	2014-09-29	2016-04-07	摩尔动力(北京)技术股份有限公司	压胀一体对转叶轮机构
EP3734078B1 (de) *	2020-03-05	2022-01-12	Pfeiffer Vacuum Technology AG	Turbomolekularpumpe und verfahren zur herstellung einer statorscheibe für eine solche

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL281280A (de) *
FR519759A (fr) *	1919-12-24	1921-06-15	Anciens Ets Sautter Harle	Hélice à aile métallique
US1767786A (en) *	1927-05-06	1930-06-24	William Braat	Propeller
US2011672A (en) *	1933-06-07	1935-08-20	Barker Auriol	Screw propeller
US2500071A (en) *	1948-03-12	1950-03-07	Edmund E Hans	Fan
DE1503704C3 (de) *	1966-12-30	1972-03-23	Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar	Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
BE757354A (fr) *	1969-10-27	1971-03-16	Sargent Welch Scientific Co	Pompe turbomoleculaire a stators et rotors perfectionnes

1970
- 1970-07-15 DE DE2035063A patent/DE2035063C3/de not_active Expired
1971
- 1971-06-17 FR FR7121957A patent/FR2097945A5/fr not_active Expired
- 1971-06-23 SE SE7108187A patent/SE371867B/xx unknown
- 1971-06-28 CH CH947471A patent/CH529927A/de not_active IP Right Cessation
- 1971-07-09 NL NL7109533.A patent/NL157387B/xx not_active IP Right Cessation
- 1971-07-12 GB GB3257071A patent/GB1308263A/en not_active Expired
- 1971-07-12 US US00161662A patent/US3748055A/en not_active Expired - Lifetime
- 1971-07-13 BE BE769932A patent/BE769932A/xx unknown
- 1971-07-13 CA CA118,A patent/CA950872A/en not_active Expired
- 1971-07-13 JP JP46051503A patent/JPS5224683B1/ja active Pending

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2005264932A (ja) *	2004-03-16	2005-09-29	Pfeiffer Vacuum Gmbh	ターボ分子ポンプおよびそのディスクの製造方法

Also Published As

Publication number	Publication date
FR2097945A5 (de)	1972-03-03
BE769932A (fr)	1971-11-16
CH529927A (de)	1972-10-31
NL157387B (nl)	1978-07-17
DE2035063B2 (de)	1973-10-31
SE371867B (de)	1974-12-02
DE2035063A1 (de)	1972-01-20
US3748055A (en)	1973-07-24
GB1308263A (en)	1973-02-21
DE2035063C3 (de)	1974-05-30
CA950872A (en)	1974-07-09
NL7109533A (de)	1972-01-18

Publication	Publication Date	Title
AR204384A1 (de)	1976-02-06
FR2097945A5 (de)	1972-03-03
ATA96471A (de)	1973-02-15
AU2044470A (de)	1972-03-30
AU1473870A (de)	1971-11-11
AU1336970A (de)	1971-10-07
AU1716970A (de)	1972-01-06
AU1833270A (de)	1972-02-10
AU2017870A (de)	1972-03-23
AU1517670A (de)	1971-11-18
AR195465A1 (de)	1973-10-15
AU1581370A (de)	1971-12-09
AU1879170A (de)	1972-02-17
AU1064870A (de)	1971-07-29
AU1943370A (de)	1972-03-09
AU1343870A (de)	1971-10-07
AU1086670A (de)	1971-08-05
AU1277070A (de)	1971-09-23
AU2119370A (de)	1972-04-20
AU1881070A (de)	1972-02-17
AU1328670A (de)	1971-10-07
AU1247570A (de)	1971-09-16
AU1235770A (de)	1971-09-16
AU1083170A (de)	1971-08-05
AU1789870A (de)	1972-01-27

JPS5224683B1 - - Google Patents

Info

Links

Classifications

Landscapes

Applications Claiming Priority (1)

Publications (1)

Family

ID=5776829

Family Applications (1)

Country Status (10)

Cited By (1)

Families Citing this family (13)

Family Cites Families (7)

Cited By (1)

Also Published As

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