JPS5227076A - Equipment for ionic plating - Google Patents

Equipment for ionic plating

Info

Publication number
JPS5227076A
JPS5227076A JP10362075A JP10362075A JPS5227076A JP S5227076 A JPS5227076 A JP S5227076A JP 10362075 A JP10362075 A JP 10362075A JP 10362075 A JP10362075 A JP 10362075A JP S5227076 A JPS5227076 A JP S5227076A
Authority
JP
Japan
Prior art keywords
equipment
ionic plating
plating
ionic
waste liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10362075A
Other languages
Japanese (ja)
Inventor
Satoshi Ishihama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Daini Seikosha Co Ltd
Seiko Instruments and Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daini Seikosha Co Ltd, Seiko Instruments and Electronics Ltd filed Critical Daini Seikosha Co Ltd
Priority to JP10362075A priority Critical patent/JPS5227076A/en
Publication of JPS5227076A publication Critical patent/JPS5227076A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:Equipment for ionic plating which can coat easily alloys of uniform composition and does not issue out waste liquid as it is a dry process.
JP10362075A 1975-08-27 1975-08-27 Equipment for ionic plating Pending JPS5227076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10362075A JPS5227076A (en) 1975-08-27 1975-08-27 Equipment for ionic plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10362075A JPS5227076A (en) 1975-08-27 1975-08-27 Equipment for ionic plating

Publications (1)

Publication Number Publication Date
JPS5227076A true JPS5227076A (en) 1977-03-01

Family

ID=14358799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10362075A Pending JPS5227076A (en) 1975-08-27 1975-08-27 Equipment for ionic plating

Country Status (1)

Country Link
JP (1) JPS5227076A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084472A (en) * 1973-11-30 1975-07-08
JPS50100173A (en) * 1974-01-09 1975-08-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084472A (en) * 1973-11-30 1975-07-08
JPS50100173A (en) * 1974-01-09 1975-08-08

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