JPS5227266A - Wafer support - Google Patents

Wafer support

Info

Publication number
JPS5227266A
JPS5227266A JP50102197A JP10219775A JPS5227266A JP S5227266 A JPS5227266 A JP S5227266A JP 50102197 A JP50102197 A JP 50102197A JP 10219775 A JP10219775 A JP 10219775A JP S5227266 A JPS5227266 A JP S5227266A
Authority
JP
Japan
Prior art keywords
wafer
wafer support
damaging
periphery
stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50102197A
Other languages
Japanese (ja)
Inventor
Kinya Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50102197A priority Critical patent/JPS5227266A/en
Publication of JPS5227266A publication Critical patent/JPS5227266A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To easily remove a wafer attached to a wafer stand by inducting air through the periphery of the wafer without damaging the wafer.
JP50102197A 1975-08-25 1975-08-25 Wafer support Pending JPS5227266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50102197A JPS5227266A (en) 1975-08-25 1975-08-25 Wafer support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50102197A JPS5227266A (en) 1975-08-25 1975-08-25 Wafer support

Publications (1)

Publication Number Publication Date
JPS5227266A true JPS5227266A (en) 1977-03-01

Family

ID=14320923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50102197A Pending JPS5227266A (en) 1975-08-25 1975-08-25 Wafer support

Country Status (1)

Country Link
JP (1) JPS5227266A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605539A (en) * 1983-06-23 1985-01-12 Fujitsu Ltd Electrostatic absorber
US5442828A (en) * 1992-11-30 1995-08-22 Ontrak Systems, Inc. Double-sided wafer scrubber with a wet submersing silicon wafer indexer
CN112133663A (en) * 2019-06-24 2020-12-25 株式会社迪思科 Holding device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605539A (en) * 1983-06-23 1985-01-12 Fujitsu Ltd Electrostatic absorber
US5442828A (en) * 1992-11-30 1995-08-22 Ontrak Systems, Inc. Double-sided wafer scrubber with a wet submersing silicon wafer indexer
CN112133663A (en) * 2019-06-24 2020-12-25 株式会社迪思科 Holding device
JP2021000712A (en) * 2019-06-24 2021-01-07 株式会社ディスコ Holding device

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Legal Events

Date Code Title Description
A761 Written withdrawal of application

Effective date: 20040224

Free format text: JAPANESE INTERMEDIATE CODE: A761