JPS5227351A - Wafer process control system - Google Patents

Wafer process control system

Info

Publication number
JPS5227351A
JPS5227351A JP10297075A JP10297075A JPS5227351A JP S5227351 A JPS5227351 A JP S5227351A JP 10297075 A JP10297075 A JP 10297075A JP 10297075 A JP10297075 A JP 10297075A JP S5227351 A JPS5227351 A JP S5227351A
Authority
JP
Japan
Prior art keywords
control system
process control
wafer process
wafer
processing control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10297075A
Other languages
Japanese (ja)
Inventor
Susumu Nanko
Hiroshi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10297075A priority Critical patent/JPS5227351A/en
Publication of JPS5227351A publication Critical patent/JPS5227351A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: An accurate and effective wafer processing control can be ensured by utilizing dummy wafer which contains marks or characters necessary for the processing control and also can be stored into a magazine as the real wafer.
COPYRIGHT: (C)1977,JPO&Japio
JP10297075A 1975-08-27 1975-08-27 Wafer process control system Pending JPS5227351A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10297075A JPS5227351A (en) 1975-08-27 1975-08-27 Wafer process control system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10297075A JPS5227351A (en) 1975-08-27 1975-08-27 Wafer process control system

Publications (1)

Publication Number Publication Date
JPS5227351A true JPS5227351A (en) 1977-03-01

Family

ID=14341612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10297075A Pending JPS5227351A (en) 1975-08-27 1975-08-27 Wafer process control system

Country Status (1)

Country Link
JP (1) JPS5227351A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner
JPS55115325A (en) * 1979-02-28 1980-09-05 Chiyou Lsi Gijutsu Kenkyu Kumiai Numbering method of semiconductor wafer
JPS5951657U (en) * 1982-09-30 1984-04-05 日本電気ホームエレクトロニクス株式会社 Shock absorber
JPS6120310A (en) * 1984-07-07 1986-01-29 Wacom Co Ltd Cylindrical coil and manufacture thereof
JP2001148334A (en) * 1999-11-22 2001-05-29 Nikko Materials Co Ltd Dummy wafer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner
JPS55115325A (en) * 1979-02-28 1980-09-05 Chiyou Lsi Gijutsu Kenkyu Kumiai Numbering method of semiconductor wafer
JPS5951657U (en) * 1982-09-30 1984-04-05 日本電気ホームエレクトロニクス株式会社 Shock absorber
JPS6120310A (en) * 1984-07-07 1986-01-29 Wacom Co Ltd Cylindrical coil and manufacture thereof
JP2001148334A (en) * 1999-11-22 2001-05-29 Nikko Materials Co Ltd Dummy wafer

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