JPS5228347A - Position detector unit - Google Patents

Position detector unit

Info

Publication number
JPS5228347A
JPS5228347A JP10411475A JP10411475A JPS5228347A JP S5228347 A JPS5228347 A JP S5228347A JP 10411475 A JP10411475 A JP 10411475A JP 10411475 A JP10411475 A JP 10411475A JP S5228347 A JPS5228347 A JP S5228347A
Authority
JP
Japan
Prior art keywords
position detector
detector unit
rotary
endocer
irregular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10411475A
Other languages
Japanese (ja)
Inventor
Nobuya Shinoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP10411475A priority Critical patent/JPS5228347A/en
Publication of JPS5228347A publication Critical patent/JPS5228347A/en
Pending legal-status Critical Current

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  • Electronic Switches (AREA)

Abstract

PURPOSE: Detection of the displacement from the reference point with the pulse number by connecting the rotary endocer of the transducer directly with the rotary prism to protect the accuracy from the irregular rotative velocity of the drive motor.
COPYRIGHT: (C)1977,JPO&Japio
JP10411475A 1975-08-29 1975-08-29 Position detector unit Pending JPS5228347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10411475A JPS5228347A (en) 1975-08-29 1975-08-29 Position detector unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10411475A JPS5228347A (en) 1975-08-29 1975-08-29 Position detector unit

Publications (1)

Publication Number Publication Date
JPS5228347A true JPS5228347A (en) 1977-03-03

Family

ID=14372087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10411475A Pending JPS5228347A (en) 1975-08-29 1975-08-29 Position detector unit

Country Status (1)

Country Link
JP (1) JPS5228347A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3039543A1 (en) * 1979-10-22 1981-09-10 Shin-Etsu Chemical Co., Ltd., Tokyo METHOD FOR PRODUCING PVC RESINS
US4380395A (en) * 1979-06-04 1983-04-19 Hitachi, Ltd. Reduction projection aligner system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011061A (en) * 1973-05-11 1975-02-04
JPS5025260A (en) * 1973-06-15 1975-03-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011061A (en) * 1973-05-11 1975-02-04
JPS5025260A (en) * 1973-06-15 1975-03-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4380395A (en) * 1979-06-04 1983-04-19 Hitachi, Ltd. Reduction projection aligner system
DE3039543A1 (en) * 1979-10-22 1981-09-10 Shin-Etsu Chemical Co., Ltd., Tokyo METHOD FOR PRODUCING PVC RESINS

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