JPS5229162A - Monitor of charged beam radius - Google Patents

Monitor of charged beam radius

Info

Publication number
JPS5229162A
JPS5229162A JP50104993A JP10499375A JPS5229162A JP S5229162 A JPS5229162 A JP S5229162A JP 50104993 A JP50104993 A JP 50104993A JP 10499375 A JP10499375 A JP 10499375A JP S5229162 A JPS5229162 A JP S5229162A
Authority
JP
Japan
Prior art keywords
monitor
charged beam
beam radius
radius
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50104993A
Other languages
Japanese (ja)
Inventor
Norio Saito
Genya Matsuoka
Isamu Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50104993A priority Critical patent/JPS5229162A/en
Publication of JPS5229162A publication Critical patent/JPS5229162A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain monitor of charged beam radius which enables to see magnified picture on CRT by adjusting the beam redius.
COPYRIGHT: (C)1977,JPO&Japio
JP50104993A 1975-09-01 1975-09-01 Monitor of charged beam radius Pending JPS5229162A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50104993A JPS5229162A (en) 1975-09-01 1975-09-01 Monitor of charged beam radius

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50104993A JPS5229162A (en) 1975-09-01 1975-09-01 Monitor of charged beam radius

Publications (1)

Publication Number Publication Date
JPS5229162A true JPS5229162A (en) 1977-03-04

Family

ID=14395608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50104993A Pending JPS5229162A (en) 1975-09-01 1975-09-01 Monitor of charged beam radius

Country Status (1)

Country Link
JP (1) JPS5229162A (en)

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