JPS5230453A - Pattern matching device - Google Patents

Pattern matching device

Info

Publication number
JPS5230453A
JPS5230453A JP10653775A JP10653775A JPS5230453A JP S5230453 A JPS5230453 A JP S5230453A JP 10653775 A JP10653775 A JP 10653775A JP 10653775 A JP10653775 A JP 10653775A JP S5230453 A JPS5230453 A JP S5230453A
Authority
JP
Japan
Prior art keywords
pattern matching
matching device
optical system
observing
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10653775A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamaguchi
Yasuo Nakagawa
Yoshisada Oshida
Keiji Kataoka
Kimio Tateno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10653775A priority Critical patent/JPS5230453A/en
Publication of JPS5230453A publication Critical patent/JPS5230453A/en
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE: In an optical system for generating a number of images, it is intended to highly accurately effect pattern alignment by permitting the light diffracted in a lens hologram array to be bent by means of a half mirror for image formation and observing the surface of the formed image through said mirror by means of an observing optical system.
COPYRIGHT: (C)1977,JPO&Japio
JP10653775A 1975-09-04 1975-09-04 Pattern matching device Pending JPS5230453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10653775A JPS5230453A (en) 1975-09-04 1975-09-04 Pattern matching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10653775A JPS5230453A (en) 1975-09-04 1975-09-04 Pattern matching device

Publications (1)

Publication Number Publication Date
JPS5230453A true JPS5230453A (en) 1977-03-08

Family

ID=14436126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10653775A Pending JPS5230453A (en) 1975-09-04 1975-09-04 Pattern matching device

Country Status (1)

Country Link
JP (1) JPS5230453A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5699193A (en) * 1995-07-10 1997-12-16 Finetech Gesellschaft Fur Electronik Technologie Mbh Apparatus and method for the accurate positioning of components for flip-chip mounting

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3658403A (en) * 1968-06-20 1972-04-25 Rca Corp High fidelity readout of a hologram performing the function of a complex wave modifying structure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3658403A (en) * 1968-06-20 1972-04-25 Rca Corp High fidelity readout of a hologram performing the function of a complex wave modifying structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5699193A (en) * 1995-07-10 1997-12-16 Finetech Gesellschaft Fur Electronik Technologie Mbh Apparatus and method for the accurate positioning of components for flip-chip mounting

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