JPS5230996A - Electron beam processing device - Google Patents

Electron beam processing device

Info

Publication number
JPS5230996A
JPS5230996A JP50107740A JP10774075A JPS5230996A JP S5230996 A JPS5230996 A JP S5230996A JP 50107740 A JP50107740 A JP 50107740A JP 10774075 A JP10774075 A JP 10774075A JP S5230996 A JPS5230996 A JP S5230996A
Authority
JP
Japan
Prior art keywords
processing device
electron beam
beam processing
electron
acicular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50107740A
Other languages
Japanese (ja)
Inventor
Nanao Kawai
Takao Tanaka
Hidenori Sakauchi
Ryuichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP50107740A priority Critical patent/JPS5230996A/en
Publication of JPS5230996A publication Critical patent/JPS5230996A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To obtain a highly bright submicron electron beam processing device having small beam radius by fixing a cathode for emission of beat electron on a support metal or support carbon capable of directly heating electrically an acicular lanthanum boride single crystal of end radius less than 5mm.
COPYRIGHT: (C)1977,JPO&Japio
JP50107740A 1975-09-04 1975-09-04 Electron beam processing device Pending JPS5230996A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50107740A JPS5230996A (en) 1975-09-04 1975-09-04 Electron beam processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50107740A JPS5230996A (en) 1975-09-04 1975-09-04 Electron beam processing device

Publications (1)

Publication Number Publication Date
JPS5230996A true JPS5230996A (en) 1977-03-09

Family

ID=14466742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50107740A Pending JPS5230996A (en) 1975-09-04 1975-09-04 Electron beam processing device

Country Status (1)

Country Link
JP (1) JPS5230996A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351921A (en) * 1980-01-11 1982-09-28 Mitsubishi Rayon Co., Ltd. Resin composition for use in uncoated exterior material
JPH0850873A (en) * 1994-08-08 1996-02-20 Nec Kansai Ltd Hot cathode structure and electron beam working device using this hot cathode structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351921A (en) * 1980-01-11 1982-09-28 Mitsubishi Rayon Co., Ltd. Resin composition for use in uncoated exterior material
JPH0850873A (en) * 1994-08-08 1996-02-20 Nec Kansai Ltd Hot cathode structure and electron beam working device using this hot cathode structure

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