JPS5236445B2 - - Google Patents
Info
- Publication number
- JPS5236445B2 JPS5236445B2 JP2286474A JP2286474A JPS5236445B2 JP S5236445 B2 JPS5236445 B2 JP S5236445B2 JP 2286474 A JP2286474 A JP 2286474A JP 2286474 A JP2286474 A JP 2286474A JP S5236445 B2 JPS5236445 B2 JP S5236445B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2286474A JPS5236445B2 (de) | 1974-02-28 | 1974-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2286474A JPS5236445B2 (de) | 1974-02-28 | 1974-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50118803A JPS50118803A (de) | 1975-09-17 |
| JPS5236445B2 true JPS5236445B2 (de) | 1977-09-16 |
Family
ID=12094559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2286474A Expired JPS5236445B2 (de) | 1974-02-28 | 1974-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5236445B2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01112245A (ja) * | 1987-05-11 | 1989-04-28 | Shinku Lab:Kk | 現像方法及び現像装置 |
| US5443942A (en) * | 1990-11-28 | 1995-08-22 | Canon Kabushiki Kaisha | Process for removing resist |
-
1974
- 1974-02-28 JP JP2286474A patent/JPS5236445B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50118803A (de) | 1975-09-17 |