JPS5239367A - Method for surface treatment of semiconductor substrate - Google Patents

Method for surface treatment of semiconductor substrate

Info

Publication number
JPS5239367A
JPS5239367A JP11467175A JP11467175A JPS5239367A JP S5239367 A JPS5239367 A JP S5239367A JP 11467175 A JP11467175 A JP 11467175A JP 11467175 A JP11467175 A JP 11467175A JP S5239367 A JPS5239367 A JP S5239367A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
surface treatment
aqueous solution
hydrofluoric acid
alkali hydroxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11467175A
Other languages
Japanese (ja)
Inventor
Tadanobu Hayashi
Kenji Suzuki
Yoshiteru Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11467175A priority Critical patent/JPS5239367A/en
Publication of JPS5239367A publication Critical patent/JPS5239367A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To made effective purification of surface of the semiconductor substrate by using aqueous solution with specified concentration of hydrofluoric acid or alkali hydroxide.
COPYRIGHT: (C)1977,JPO&Japio
JP11467175A 1975-09-25 1975-09-25 Method for surface treatment of semiconductor substrate Pending JPS5239367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11467175A JPS5239367A (en) 1975-09-25 1975-09-25 Method for surface treatment of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11467175A JPS5239367A (en) 1975-09-25 1975-09-25 Method for surface treatment of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5239367A true JPS5239367A (en) 1977-03-26

Family

ID=14643676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11467175A Pending JPS5239367A (en) 1975-09-25 1975-09-25 Method for surface treatment of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5239367A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880840A (en) * 1981-11-09 1983-05-16 Matsushita Electric Ind Co Ltd Treatment of crystalline substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880840A (en) * 1981-11-09 1983-05-16 Matsushita Electric Ind Co Ltd Treatment of crystalline substrate

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