JPS5240084A - Process for production of semiconductor devices - Google Patents

Process for production of semiconductor devices

Info

Publication number
JPS5240084A
JPS5240084A JP11583275A JP11583275A JPS5240084A JP S5240084 A JPS5240084 A JP S5240084A JP 11583275 A JP11583275 A JP 11583275A JP 11583275 A JP11583275 A JP 11583275A JP S5240084 A JPS5240084 A JP S5240084A
Authority
JP
Japan
Prior art keywords
production
semiconductor devices
wirings
microwirings
miltilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11583275A
Other languages
Japanese (ja)
Other versions
JPS5841775B2 (en
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11583275A priority Critical patent/JPS5841775B2/en
Publication of JPS5240084A publication Critical patent/JPS5240084A/en
Publication of JPS5841775B2 publication Critical patent/JPS5841775B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To form metal wirings to a flat surface and provide the second metal nitride film therby realizing miltilayer microwirings without disconnection of wirings.
COPYRIGHT: (C)1977,JPO&Japio
JP11583275A 1975-09-25 1975-09-25 hand tai souchi no seizou houhou Expired JPS5841775B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11583275A JPS5841775B2 (en) 1975-09-25 1975-09-25 hand tai souchi no seizou houhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11583275A JPS5841775B2 (en) 1975-09-25 1975-09-25 hand tai souchi no seizou houhou

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP16622982A Division JPS58130544A (en) 1982-09-24 1982-09-24 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5240084A true JPS5240084A (en) 1977-03-28
JPS5841775B2 JPS5841775B2 (en) 1983-09-14

Family

ID=14672212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11583275A Expired JPS5841775B2 (en) 1975-09-25 1975-09-25 hand tai souchi no seizou houhou

Country Status (1)

Country Link
JP (1) JPS5841775B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940000750B1 (en) * 1986-03-05 1994-01-28 스미토모덴기고교 가부시키가이샤 Semiconductor device and manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device

Also Published As

Publication number Publication date
JPS5841775B2 (en) 1983-09-14

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