JPS5242073A - Process for producing of semiconductor device - Google Patents
Process for producing of semiconductor deviceInfo
- Publication number
- JPS5242073A JPS5242073A JP8535576A JP8535576A JPS5242073A JP S5242073 A JPS5242073 A JP S5242073A JP 8535576 A JP8535576 A JP 8535576A JP 8535576 A JP8535576 A JP 8535576A JP S5242073 A JPS5242073 A JP S5242073A
- Authority
- JP
- Japan
- Prior art keywords
- producing
- semiconductor device
- layer
- subjecting
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 2
- 239000010410 layer Substances 0.000 abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 238000010306 acid treatment Methods 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 238000007747 plating Methods 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To form a clean secondary Ni layer by removing surface layer containing much phosphorus composition of a primary Ni plating layer and subjecting the same to hydrofluoric acid treatment, thereby making an electrode of resistivity contact.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8535576A JPS5242073A (en) | 1976-07-17 | 1976-07-17 | Process for producing of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8535576A JPS5242073A (en) | 1976-07-17 | 1976-07-17 | Process for producing of semiconductor device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7765871A Division JPS4843583A (en) | 1971-10-04 | 1971-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5242073A true JPS5242073A (en) | 1977-04-01 |
Family
ID=13856375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8535576A Pending JPS5242073A (en) | 1976-07-17 | 1976-07-17 | Process for producing of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5242073A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006024880A (en) * | 2004-06-09 | 2006-01-26 | Matsushita Electric Ind Co Ltd | Semiconductor device and manufacturing method thereof |
| WO2016031004A1 (en) * | 2014-08-28 | 2016-03-03 | 三菱電機株式会社 | Semiconductor device manufacturing method and semiconductor device |
-
1976
- 1976-07-17 JP JP8535576A patent/JPS5242073A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006024880A (en) * | 2004-06-09 | 2006-01-26 | Matsushita Electric Ind Co Ltd | Semiconductor device and manufacturing method thereof |
| WO2016031004A1 (en) * | 2014-08-28 | 2016-03-03 | 三菱電機株式会社 | Semiconductor device manufacturing method and semiconductor device |
| JPWO2016031004A1 (en) * | 2014-08-28 | 2017-04-27 | 三菱電機株式会社 | Manufacturing method of semiconductor device |
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