JPS5242498A - Method of chemical polishing of single crystal of sapphire - Google Patents

Method of chemical polishing of single crystal of sapphire

Info

Publication number
JPS5242498A
JPS5242498A JP11772975A JP11772975A JPS5242498A JP S5242498 A JPS5242498 A JP S5242498A JP 11772975 A JP11772975 A JP 11772975A JP 11772975 A JP11772975 A JP 11772975A JP S5242498 A JPS5242498 A JP S5242498A
Authority
JP
Japan
Prior art keywords
sapphire
single crystal
chemical polishing
polishing
flatly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11772975A
Other languages
Japanese (ja)
Inventor
Tatsumi Mizutani
Hideo Komatsu
Shinya Iida
Mitsuru Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11772975A priority Critical patent/JPS5242498A/en
Publication of JPS5242498A publication Critical patent/JPS5242498A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: Method for polishing chemically the surface of sapphire flatly with phosphoric acid while preventing the deposition of aluminium metaphosphate.
COPYRIGHT: (C)1977,JPO&Japio
JP11772975A 1975-10-01 1975-10-01 Method of chemical polishing of single crystal of sapphire Pending JPS5242498A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11772975A JPS5242498A (en) 1975-10-01 1975-10-01 Method of chemical polishing of single crystal of sapphire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11772975A JPS5242498A (en) 1975-10-01 1975-10-01 Method of chemical polishing of single crystal of sapphire

Publications (1)

Publication Number Publication Date
JPS5242498A true JPS5242498A (en) 1977-04-02

Family

ID=14718827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11772975A Pending JPS5242498A (en) 1975-10-01 1975-10-01 Method of chemical polishing of single crystal of sapphire

Country Status (1)

Country Link
JP (1) JPS5242498A (en)

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