JPS524260A - Physical factor measuring system - Google Patents

Physical factor measuring system

Info

Publication number
JPS524260A
JPS524260A JP8063575A JP8063575A JPS524260A JP S524260 A JPS524260 A JP S524260A JP 8063575 A JP8063575 A JP 8063575A JP 8063575 A JP8063575 A JP 8063575A JP S524260 A JPS524260 A JP S524260A
Authority
JP
Japan
Prior art keywords
measuring system
physical factor
factor measuring
thickness
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8063575A
Other languages
Japanese (ja)
Other versions
JPS6024401B2 (en
Inventor
Nobuyoshi Tanaka
Naoki Ayada
Mitsuo Takeda
Susumu Matsumura
Kazuya Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP50080635A priority Critical patent/JPS6024401B2/en
Priority to DE19762628836 priority patent/DE2628836C3/en
Publication of JPS524260A publication Critical patent/JPS524260A/en
Priority to US05/813,298 priority patent/US4105335A/en
Publication of JPS6024401B2 publication Critical patent/JPS6024401B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: Wave faces with phase gap illuminated by the light beam with thickness of wave length are divided. Each divided face is inclined and folded to measure such physical factors as thickness and reflection factor without using a vibration mirror.
COPYRIGHT: (C)1977,JPO&Japio
JP50080635A 1975-06-28 1975-06-28 How to measure the physical constants of a measured object Expired JPS6024401B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP50080635A JPS6024401B2 (en) 1975-06-28 1975-06-28 How to measure the physical constants of a measured object
DE19762628836 DE2628836C3 (en) 1975-06-28 1976-06-26 Optical phase discriminator
US05/813,298 US4105335A (en) 1975-06-28 1977-07-06 Interferometric optical phase discrimination apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50080635A JPS6024401B2 (en) 1975-06-28 1975-06-28 How to measure the physical constants of a measured object

Publications (2)

Publication Number Publication Date
JPS524260A true JPS524260A (en) 1977-01-13
JPS6024401B2 JPS6024401B2 (en) 1985-06-12

Family

ID=13723817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50080635A Expired JPS6024401B2 (en) 1975-06-28 1975-06-28 How to measure the physical constants of a measured object

Country Status (2)

Country Link
JP (1) JPS6024401B2 (en)
DE (1) DE2628836C3 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59220632A (en) * 1983-05-30 1984-12-12 Shimadzu Corp Detector of refractometer
JPS60100004A (en) * 1983-11-04 1985-06-03 Canon Inc Regulating device of space
JPS6099671A (en) * 1983-11-04 1985-06-03 Canon Inc Heat transfer recorder
JPS60100005A (en) * 1983-11-04 1985-06-03 Canon Inc Regulating device of space
JPS6419103U (en) * 1987-07-23 1989-01-31
CN108759698A (en) * 2018-08-02 2018-11-06 淮阴师范学院 The low-coherent light interferometric method and device of more mirror lens group minute surface spacing

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005258A (en) * 1980-09-22 1982-04-16 Philips Nv INTERFEROMETER.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49109060A (en) * 1973-01-12 1974-10-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49109060A (en) * 1973-01-12 1974-10-17

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59220632A (en) * 1983-05-30 1984-12-12 Shimadzu Corp Detector of refractometer
JPS60100004A (en) * 1983-11-04 1985-06-03 Canon Inc Regulating device of space
JPS6099671A (en) * 1983-11-04 1985-06-03 Canon Inc Heat transfer recorder
JPS60100005A (en) * 1983-11-04 1985-06-03 Canon Inc Regulating device of space
JPS6419103U (en) * 1987-07-23 1989-01-31
CN108759698A (en) * 2018-08-02 2018-11-06 淮阴师范学院 The low-coherent light interferometric method and device of more mirror lens group minute surface spacing

Also Published As

Publication number Publication date
DE2628836B2 (en) 1980-02-28
JPS6024401B2 (en) 1985-06-12
DE2628836C3 (en) 1980-10-30
DE2628836A1 (en) 1977-01-13

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