JPS5242748A - Process for detecting the position and shape of an object - Google Patents

Process for detecting the position and shape of an object

Info

Publication number
JPS5242748A
JPS5242748A JP11770275A JP11770275A JPS5242748A JP S5242748 A JPS5242748 A JP S5242748A JP 11770275 A JP11770275 A JP 11770275A JP 11770275 A JP11770275 A JP 11770275A JP S5242748 A JPS5242748 A JP S5242748A
Authority
JP
Japan
Prior art keywords
detecting
shape
points
pellet
coordinates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11770275A
Other languages
Japanese (ja)
Inventor
Taku Sugawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11770275A priority Critical patent/JPS5242748A/en
Publication of JPS5242748A publication Critical patent/JPS5242748A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE: To detect a position at which a pellet is correctly mounted to a semiconductor substrate; this being accomplished by moving a stylus along a predetermined path in such a way that it makes contact with the outer perpheral surface of an object to be measured at least three points and determining the coordinates of said contact points.
COPYRIGHT: (C)1977,JPO&Japio
JP11770275A 1975-10-01 1975-10-01 Process for detecting the position and shape of an object Pending JPS5242748A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11770275A JPS5242748A (en) 1975-10-01 1975-10-01 Process for detecting the position and shape of an object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11770275A JPS5242748A (en) 1975-10-01 1975-10-01 Process for detecting the position and shape of an object

Publications (1)

Publication Number Publication Date
JPS5242748A true JPS5242748A (en) 1977-04-02

Family

ID=14718183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11770275A Pending JPS5242748A (en) 1975-10-01 1975-10-01 Process for detecting the position and shape of an object

Country Status (1)

Country Link
JP (1) JPS5242748A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142092A (en) * 1987-10-21 1989-06-02 Dearborn Chem Co Ltd Rust removing method and composition
JPH01171697A (en) * 1987-12-16 1989-07-06 Dubois Chem Inc Thick all-in-one boiler water treatment composition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01142092A (en) * 1987-10-21 1989-06-02 Dearborn Chem Co Ltd Rust removing method and composition
JPH01171697A (en) * 1987-12-16 1989-07-06 Dubois Chem Inc Thick all-in-one boiler water treatment composition

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