JPS5247369A - Method of polishing semiconductor materials - Google Patents

Method of polishing semiconductor materials

Info

Publication number
JPS5247369A
JPS5247369A JP12174875A JP12174875A JPS5247369A JP S5247369 A JPS5247369 A JP S5247369A JP 12174875 A JP12174875 A JP 12174875A JP 12174875 A JP12174875 A JP 12174875A JP S5247369 A JPS5247369 A JP S5247369A
Authority
JP
Japan
Prior art keywords
semiconductor materials
polishing semiconductor
polishing
materials
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12174875A
Other languages
Japanese (ja)
Other versions
JPS5758775B2 (en
Inventor
Uooresu Shiaazu Jiyuni Jiyooji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Priority to JP12174875A priority Critical patent/JPS5247369A/en
Publication of JPS5247369A publication Critical patent/JPS5247369A/en
Publication of JPS5758775B2 publication Critical patent/JPS5758775B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP12174875A 1975-10-08 1975-10-08 Method of polishing semiconductor materials Granted JPS5247369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12174875A JPS5247369A (en) 1975-10-08 1975-10-08 Method of polishing semiconductor materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12174875A JPS5247369A (en) 1975-10-08 1975-10-08 Method of polishing semiconductor materials

Publications (2)

Publication Number Publication Date
JPS5247369A true JPS5247369A (en) 1977-04-15
JPS5758775B2 JPS5758775B2 (en) 1982-12-11

Family

ID=14818896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12174875A Granted JPS5247369A (en) 1975-10-08 1975-10-08 Method of polishing semiconductor materials

Country Status (1)

Country Link
JP (1) JPS5247369A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150789A (en) * 1976-06-11 1977-12-14 Nippon Telegr & Teleph Corp <Ntt> Undisturred mirror surface polishing method of crystal
JPH01135026A (en) * 1987-10-16 1989-05-26 Wacker Chemitronic Ges Elekton Grundstoffe Mbh Blurless polishing of semiconductor slice
JPH11302635A (en) * 1998-04-24 1999-11-02 Hiroaki Tanaka Polishing composition and method for polishing using it
JP2007258606A (en) * 2006-03-24 2007-10-04 Fujifilm Corp Polishing liquid for chemical mechanical polishing
US7512216B2 (en) 2004-03-30 2009-03-31 British Telecommunications Plc Joint fault detection
US7611552B2 (en) 2004-03-29 2009-11-03 Nitta Haas Incorporated Semiconductor polishing composition

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3509188B2 (en) * 1994-06-22 2004-03-22 ソニー株式会社 Method for producing fine particles for chemical mechanical polishing and polishing method using the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52150789A (en) * 1976-06-11 1977-12-14 Nippon Telegr & Teleph Corp <Ntt> Undisturred mirror surface polishing method of crystal
JPH01135026A (en) * 1987-10-16 1989-05-26 Wacker Chemitronic Ges Elekton Grundstoffe Mbh Blurless polishing of semiconductor slice
JPH11302635A (en) * 1998-04-24 1999-11-02 Hiroaki Tanaka Polishing composition and method for polishing using it
US7611552B2 (en) 2004-03-29 2009-11-03 Nitta Haas Incorporated Semiconductor polishing composition
US7512216B2 (en) 2004-03-30 2009-03-31 British Telecommunications Plc Joint fault detection
JP2007258606A (en) * 2006-03-24 2007-10-04 Fujifilm Corp Polishing liquid for chemical mechanical polishing

Also Published As

Publication number Publication date
JPS5758775B2 (en) 1982-12-11

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