JPS5253671A - Channeling injection controlling method - Google Patents

Channeling injection controlling method

Info

Publication number
JPS5253671A
JPS5253671A JP12881075A JP12881075A JPS5253671A JP S5253671 A JPS5253671 A JP S5253671A JP 12881075 A JP12881075 A JP 12881075A JP 12881075 A JP12881075 A JP 12881075A JP S5253671 A JPS5253671 A JP S5253671A
Authority
JP
Japan
Prior art keywords
controlling method
injection controlling
channeling
channeling injection
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12881075A
Other languages
Japanese (ja)
Inventor
Hidetoshi Nishi
Tsuguo Inada
Takashi Sato
Haruo Kawada
Tsuneo Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12881075A priority Critical patent/JPS5253671A/en
Publication of JPS5253671A publication Critical patent/JPS5253671A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: To simplify the channeling control of ion implantation by inserting a current detecting element between a suppressing section and a bias power supply for the same, and detecting minimum current to complete alignment of axes.
COPYRIGHT: (C)1977,JPO&Japio
JP12881075A 1975-10-28 1975-10-28 Channeling injection controlling method Pending JPS5253671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12881075A JPS5253671A (en) 1975-10-28 1975-10-28 Channeling injection controlling method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12881075A JPS5253671A (en) 1975-10-28 1975-10-28 Channeling injection controlling method

Publications (1)

Publication Number Publication Date
JPS5253671A true JPS5253671A (en) 1977-04-30

Family

ID=14993968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12881075A Pending JPS5253671A (en) 1975-10-28 1975-10-28 Channeling injection controlling method

Country Status (1)

Country Link
JP (1) JPS5253671A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003511845A (en) * 1999-10-13 2003-03-25 アプライド マテリアルズ インコーポレイテッド Beam alignment measurement in ion implantation using Rutherford backscattering

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003511845A (en) * 1999-10-13 2003-03-25 アプライド マテリアルズ インコーポレイテッド Beam alignment measurement in ion implantation using Rutherford backscattering

Similar Documents

Publication Publication Date Title
JPS5433983A (en) Digital servo device
JPS5354762A (en) Current controlling circuit
JPS5221611A (en) Operation control appliance for power station
JPS51127671A (en) Power supply for electron gun
JPS5339806A (en) Power supply for magnetron
JPS5383175A (en) Control system for momentarily operated tool
JPS538842A (en) High frequency heater
JPS51121168A (en) A-c power control means
JPS5295018A (en) Control method for thyristor motor
JPS52112138A (en) High frequency heater
JPS53128370A (en) System for producing timer setting time
JPS5222743A (en) Power source control system
JPS5229100A (en) System for controlling magnetic attitude of satellite
JPS5219877A (en) Sampling controlling method
JPS5210976A (en) Automatic insertion control device
JPS528441A (en) Power supplying system
JPS5313092A (en) Optimun adjusting method for nuclear fuel
JPS51119496A (en) Diverter
JPS5243080A (en) Numerical control system
JPS51121756A (en) Controller for voltage fluctuation
JPS51150736A (en) A boiler fuel controlling process
JPS52133725A (en) Control computer
JPS51121757A (en) Controller for voltage fluctuation
JPS51134066A (en) Pulse phase control method
JPS52143396A (en) Controlling method of reactor built in island