JPS5254108A - Surface pulse motor - Google Patents

Surface pulse motor

Info

Publication number
JPS5254108A
JPS5254108A JP50129795A JP12979575A JPS5254108A JP S5254108 A JPS5254108 A JP S5254108A JP 50129795 A JP50129795 A JP 50129795A JP 12979575 A JP12979575 A JP 12979575A JP S5254108 A JPS5254108 A JP S5254108A
Authority
JP
Japan
Prior art keywords
pulse motor
surface pulse
highthrust
magnetic attraction
effectively utilizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50129795A
Other languages
Japanese (ja)
Inventor
Hiroshi Sakai
Norio Yano
Hisayasu Ito
Meikai Kuriyama
Taku Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50129795A priority Critical patent/JPS5254108A/en
Publication of JPS5254108A publication Critical patent/JPS5254108A/en
Pending legal-status Critical Current

Links

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  • Linear Motors (AREA)

Abstract

PURPOSE:To obtain a pulse motor having a high responsibility by effectively utilizing magnetic attraction to get a highthrust.
JP50129795A 1975-10-30 1975-10-30 Surface pulse motor Pending JPS5254108A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50129795A JPS5254108A (en) 1975-10-30 1975-10-30 Surface pulse motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129795A JPS5254108A (en) 1975-10-30 1975-10-30 Surface pulse motor

Publications (1)

Publication Number Publication Date
JPS5254108A true JPS5254108A (en) 1977-05-02

Family

ID=15018407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129795A Pending JPS5254108A (en) 1975-10-30 1975-10-30 Surface pulse motor

Country Status (1)

Country Link
JP (1) JPS5254108A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6259174B1 (en) 1997-08-21 2001-07-10 Nikon Corporation Positioning apparatus, drive unit and exposure apparatus incorporating the positioning apparatus
JP2002112526A (en) * 2000-06-26 2002-04-12 Nikon Corp Planar motor, stage positioning system, exposure equipment
JP2007214449A (en) * 2006-02-10 2007-08-23 Ushio Inc XYθ moving stage
JP2008514168A (en) * 2004-09-22 2008-05-01 シーメンス アクチエンゲゼルシヤフト Secondary parts of electrical machines

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836611A (en) * 1971-09-08 1973-05-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836611A (en) * 1971-09-08 1973-05-30

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6259174B1 (en) 1997-08-21 2001-07-10 Nikon Corporation Positioning apparatus, drive unit and exposure apparatus incorporating the positioning apparatus
JP2002112526A (en) * 2000-06-26 2002-04-12 Nikon Corp Planar motor, stage positioning system, exposure equipment
JP2008514168A (en) * 2004-09-22 2008-05-01 シーメンス アクチエンゲゼルシヤフト Secondary parts of electrical machines
JP2008514175A (en) * 2004-09-22 2008-05-01 シーメンス アクチエンゲゼルシヤフト Electric machine
US7800256B2 (en) 2004-09-22 2010-09-21 Siemens Aktiengesellschaft Electric machine
JP2007214449A (en) * 2006-02-10 2007-08-23 Ushio Inc XYθ moving stage

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