JPS5255579A - Moisture sensor - Google Patents

Moisture sensor

Info

Publication number
JPS5255579A
JPS5255579A JP13036375A JP13036375A JPS5255579A JP S5255579 A JPS5255579 A JP S5255579A JP 13036375 A JP13036375 A JP 13036375A JP 13036375 A JP13036375 A JP 13036375A JP S5255579 A JPS5255579 A JP S5255579A
Authority
JP
Japan
Prior art keywords
moisture sensor
moisture
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13036375A
Other languages
Japanese (ja)
Inventor
Tadatoshi Kamimori
Hiroki Oota
Hironobu Sakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP13036375A priority Critical patent/JPS5255579A/en
Publication of JPS5255579A publication Critical patent/JPS5255579A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP13036375A 1975-10-31 1975-10-31 Moisture sensor Pending JPS5255579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13036375A JPS5255579A (en) 1975-10-31 1975-10-31 Moisture sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13036375A JPS5255579A (en) 1975-10-31 1975-10-31 Moisture sensor

Publications (1)

Publication Number Publication Date
JPS5255579A true JPS5255579A (en) 1977-05-07

Family

ID=15032577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13036375A Pending JPS5255579A (en) 1975-10-31 1975-10-31 Moisture sensor

Country Status (1)

Country Link
JP (1) JPS5255579A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933828A (en) * 1982-08-04 1984-02-23 ザ・パ−キン−エルマ−・コ−ポレイシヨン Device for centering mask or wafer element used for x-ray lithography and controlling space thereof
JPS62247239A (en) * 1986-04-19 1987-10-28 Shinei Kk Moisture sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933828A (en) * 1982-08-04 1984-02-23 ザ・パ−キン−エルマ−・コ−ポレイシヨン Device for centering mask or wafer element used for x-ray lithography and controlling space thereof
JPS62247239A (en) * 1986-04-19 1987-10-28 Shinei Kk Moisture sensor

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