JPS5255580A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS5255580A
JPS5255580A JP50131095A JP13109575A JPS5255580A JP S5255580 A JPS5255580 A JP S5255580A JP 50131095 A JP50131095 A JP 50131095A JP 13109575 A JP13109575 A JP 13109575A JP S5255580 A JPS5255580 A JP S5255580A
Authority
JP
Japan
Prior art keywords
humidity sensor
provides
sensor
handle
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50131095A
Other languages
Japanese (ja)
Inventor
Hiroshi Yoda
Kazumasa Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50131095A priority Critical patent/JPS5255580A/en
Publication of JPS5255580A publication Critical patent/JPS5255580A/en
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: A hygroscopic thin film is formed on the surface of a piezoelectric resonator which makes thickness slide vibration, whereby the sensor which provides a wide range of humidity measurement, has less dependency on temperature ture, does not require temperature compensation, provides high rates of response and is easy to handle, is provided.
COPYRIGHT: (C)1977,JPO&Japio
JP50131095A 1975-10-30 1975-10-30 Humidity sensor Pending JPS5255580A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50131095A JPS5255580A (en) 1975-10-30 1975-10-30 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50131095A JPS5255580A (en) 1975-10-30 1975-10-30 Humidity sensor

Publications (1)

Publication Number Publication Date
JPS5255580A true JPS5255580A (en) 1977-05-07

Family

ID=15049850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50131095A Pending JPS5255580A (en) 1975-10-30 1975-10-30 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS5255580A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55156832A (en) * 1979-05-28 1980-12-06 Denki Kagaku Keiki Co Ltd Piezo-type dust gauge
JPS5965247A (en) * 1982-08-31 1984-04-13 ザ・バブコック・アンド・ウイルコックス・カンパニー Piezoelectric humidity measuring device
JPS63137491A (en) * 1986-11-29 1988-06-09 Shimadzu Corp Piezoelectric sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1539176A (en) * 1967-08-03 1968-09-13 Soletanche Tie rod device intended to be anchored in the ground
JPS5083073A (en) * 1973-11-22 1975-07-04
JPS5215113A (en) * 1975-07-28 1977-02-04 Kowa Sangiyou Kk Water stoppage method for anchoring in land slide protection wall construction

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1539176A (en) * 1967-08-03 1968-09-13 Soletanche Tie rod device intended to be anchored in the ground
JPS5083073A (en) * 1973-11-22 1975-07-04
JPS5215113A (en) * 1975-07-28 1977-02-04 Kowa Sangiyou Kk Water stoppage method for anchoring in land slide protection wall construction

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55156832A (en) * 1979-05-28 1980-12-06 Denki Kagaku Keiki Co Ltd Piezo-type dust gauge
JPS5965247A (en) * 1982-08-31 1984-04-13 ザ・バブコック・アンド・ウイルコックス・カンパニー Piezoelectric humidity measuring device
JPS63137491A (en) * 1986-11-29 1988-06-09 Shimadzu Corp Piezoelectric sensor

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