JPS5255880A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5255880A
JPS5255880A JP13202975A JP13202975A JPS5255880A JP S5255880 A JPS5255880 A JP S5255880A JP 13202975 A JP13202975 A JP 13202975A JP 13202975 A JP13202975 A JP 13202975A JP S5255880 A JPS5255880 A JP S5255880A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
amsk
oversize
degradation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13202975A
Other languages
Japanese (ja)
Inventor
Tadashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13202975A priority Critical patent/JPS5255880A/en
Publication of JPS5255880A publication Critical patent/JPS5255880A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To prevent the decrease in dielectric strength between B-C and the degradation in surface smoothness even when an oversize amsk is used in an IC by a dielectric isolation method.
COPYRIGHT: (C)1977,JPO&Japio
JP13202975A 1975-10-31 1975-10-31 Production of semiconductor device Pending JPS5255880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13202975A JPS5255880A (en) 1975-10-31 1975-10-31 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13202975A JPS5255880A (en) 1975-10-31 1975-10-31 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5255880A true JPS5255880A (en) 1977-05-07

Family

ID=15071822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13202975A Pending JPS5255880A (en) 1975-10-31 1975-10-31 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5255880A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973976A (en) * 1972-11-15 1974-07-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973976A (en) * 1972-11-15 1974-07-17

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