JPS5258458A - Spinner cleaning and drying mechanism - Google Patents

Spinner cleaning and drying mechanism

Info

Publication number
JPS5258458A
JPS5258458A JP13409875A JP13409875A JPS5258458A JP S5258458 A JPS5258458 A JP S5258458A JP 13409875 A JP13409875 A JP 13409875A JP 13409875 A JP13409875 A JP 13409875A JP S5258458 A JPS5258458 A JP S5258458A
Authority
JP
Japan
Prior art keywords
drying mechanism
spinner cleaning
drying
washing
rear surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13409875A
Other languages
Japanese (ja)
Inventor
Akira Kabashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13409875A priority Critical patent/JPS5258458A/en
Publication of JPS5258458A publication Critical patent/JPS5258458A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: Washing and drying are perfectly performed by washing both front and rear surfaces of a semoconductor wafer, providing jaws on the lateral faces of edges and drying their front and rear surfaces.
COPYRIGHT: (C)1977,JPO&Japio
JP13409875A 1975-11-10 1975-11-10 Spinner cleaning and drying mechanism Pending JPS5258458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13409875A JPS5258458A (en) 1975-11-10 1975-11-10 Spinner cleaning and drying mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13409875A JPS5258458A (en) 1975-11-10 1975-11-10 Spinner cleaning and drying mechanism

Publications (1)

Publication Number Publication Date
JPS5258458A true JPS5258458A (en) 1977-05-13

Family

ID=15120383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13409875A Pending JPS5258458A (en) 1975-11-10 1975-11-10 Spinner cleaning and drying mechanism

Country Status (1)

Country Link
JP (1) JPS5258458A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551276A (en) * 1978-10-12 1980-04-14 Fuji Denki Setsukei Consulting Dehydrator for umbrella
JPS6260027U (en) * 1985-09-04 1987-04-14
JPS6260028U (en) * 1985-09-18 1987-04-14
JPS62127743U (en) * 1986-02-04 1987-08-13
JPS63178531A (en) * 1987-01-20 1988-07-22 Fujitsu Ltd Washing type intermediate stage
JPH01216542A (en) * 1988-02-25 1989-08-30 Shimada Phys & Chem Ind Co Ltd Gripper opening/closing device for both-side cleaning apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551276A (en) * 1978-10-12 1980-04-14 Fuji Denki Setsukei Consulting Dehydrator for umbrella
JPS6260027U (en) * 1985-09-04 1987-04-14
JPS6260028U (en) * 1985-09-18 1987-04-14
JPS62127743U (en) * 1986-02-04 1987-08-13
JPS63178531A (en) * 1987-01-20 1988-07-22 Fujitsu Ltd Washing type intermediate stage
JPH01216542A (en) * 1988-02-25 1989-08-30 Shimada Phys & Chem Ind Co Ltd Gripper opening/closing device for both-side cleaning apparatus

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