JPS5260061A - Electronic microscope and its similar equipment - Google Patents

Electronic microscope and its similar equipment

Info

Publication number
JPS5260061A
JPS5260061A JP50136001A JP13600175A JPS5260061A JP S5260061 A JPS5260061 A JP S5260061A JP 50136001 A JP50136001 A JP 50136001A JP 13600175 A JP13600175 A JP 13600175A JP S5260061 A JPS5260061 A JP S5260061A
Authority
JP
Japan
Prior art keywords
similar equipment
electronic microscope
gas
unactive
cleansed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50136001A
Other languages
Japanese (ja)
Other versions
JPS6220663B2 (en
Inventor
Toshinori Goto
Kian Harada
Akio Mikajiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50136001A priority Critical patent/JPS5260061A/en
Publication of JPS5260061A publication Critical patent/JPS5260061A/en
Publication of JPS6220663B2 publication Critical patent/JPS6220663B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: The glow discharge is generated in atmosphere of inactive gas or mixture gas of unactive gas and O2. In this way, the material pieces around the sample can be cleansed.
COPYRIGHT: (C)1977,JPO&Japio
JP50136001A 1975-11-12 1975-11-12 Electronic microscope and its similar equipment Granted JPS5260061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136001A JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136001A JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Publications (2)

Publication Number Publication Date
JPS5260061A true JPS5260061A (en) 1977-05-18
JPS6220663B2 JPS6220663B2 (en) 1987-05-08

Family

ID=15164859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136001A Granted JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Country Status (1)

Country Link
JP (1) JPS5260061A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008123891A (en) * 2006-11-14 2008-05-29 Hitachi High-Technologies Corp Charged beam device and mirror body thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008123891A (en) * 2006-11-14 2008-05-29 Hitachi High-Technologies Corp Charged beam device and mirror body thereof

Also Published As

Publication number Publication date
JPS6220663B2 (en) 1987-05-08

Similar Documents

Publication Publication Date Title
JPS5260061A (en) Electronic microscope and its similar equipment
JPS51140870A (en) An exhaust gas treatment process
JPS51126990A (en) Process for removing nitrogen oxides
JPS5264580A (en) Sequence controller
JPS51135185A (en) Washing device
JPS51116355A (en) Gasket having graphite
JPS5221272A (en) Removing method of nitrogen oxide in gas
JPS5221273A (en) Removing method of nitrogen oxide
JPS5247502A (en) Metal refining process with thermal plasma
JPS5217698A (en) Dielectric porcelain composite to the high frequency purpose
JPS51124683A (en) Reusing method of fluorescent substance
JPS5241162A (en) Treating process of gas and its equipment
JPS51114071A (en) Gas etching method
JPS5253516A (en) Nozzle of spray apparatus for fireproof materials
JPS5345991A (en) Manufacture of semiconductor
JPS51112777A (en) Dry method of gas purification
JPS5243959A (en) Digital differential relay device
JPS5262749A (en) Furnace
JPS51150771A (en) Dry ing furnace
JPS5259341A (en) High frequency heater
JPS5216481A (en) Waste gas washing process and apparatus
JPS51131969A (en) Air cleaning device
JPS5224110A (en) Standardizing method of metal structure
JPS51131687A (en) Stress corrosion crack examination method of articles made of pure cop per
JPS5222613A (en) Multiple ignition engine