JPS5260061A - Electronic microscope and its similar equipment - Google Patents

Electronic microscope and its similar equipment

Info

Publication number
JPS5260061A
JPS5260061A JP50136001A JP13600175A JPS5260061A JP S5260061 A JPS5260061 A JP S5260061A JP 50136001 A JP50136001 A JP 50136001A JP 13600175 A JP13600175 A JP 13600175A JP S5260061 A JPS5260061 A JP S5260061A
Authority
JP
Japan
Prior art keywords
similar equipment
electronic microscope
gas
unactive
cleansed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50136001A
Other languages
Japanese (ja)
Other versions
JPS6220663B2 (en
Inventor
Toshinori Goto
Kian Harada
Akio Mikajiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50136001A priority Critical patent/JPS5260061A/en
Publication of JPS5260061A publication Critical patent/JPS5260061A/en
Publication of JPS6220663B2 publication Critical patent/JPS6220663B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: The glow discharge is generated in atmosphere of inactive gas or mixture gas of unactive gas and O2. In this way, the material pieces around the sample can be cleansed.
COPYRIGHT: (C)1977,JPO&Japio
JP50136001A 1975-11-12 1975-11-12 Electronic microscope and its similar equipment Granted JPS5260061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136001A JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136001A JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Publications (2)

Publication Number Publication Date
JPS5260061A true JPS5260061A (en) 1977-05-18
JPS6220663B2 JPS6220663B2 (en) 1987-05-08

Family

ID=15164859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136001A Granted JPS5260061A (en) 1975-11-12 1975-11-12 Electronic microscope and its similar equipment

Country Status (1)

Country Link
JP (1) JPS5260061A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008123891A (en) * 2006-11-14 2008-05-29 Hitachi High-Technologies Corp Charged beam device and mirror body thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008123891A (en) * 2006-11-14 2008-05-29 Hitachi High-Technologies Corp Charged beam device and mirror body thereof

Also Published As

Publication number Publication date
JPS6220663B2 (en) 1987-05-08

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