JPS5260074A - Charge particle beam apparatus - Google Patents

Charge particle beam apparatus

Info

Publication number
JPS5260074A
JPS5260074A JP50135999A JP13599975A JPS5260074A JP S5260074 A JPS5260074 A JP S5260074A JP 50135999 A JP50135999 A JP 50135999A JP 13599975 A JP13599975 A JP 13599975A JP S5260074 A JPS5260074 A JP S5260074A
Authority
JP
Japan
Prior art keywords
charge particle
particle beam
beam apparatus
particle apparatus
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50135999A
Other languages
Japanese (ja)
Inventor
Sakae Miyauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50135999A priority Critical patent/JPS5260074A/en
Publication of JPS5260074A publication Critical patent/JPS5260074A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To make possible highly accurate aligning in production of ultra LSIs by providing two pieces of optical length measuring devices in X direction or Y direction to a charge particle apparatus and detectiing and compensating the rotation accompanied with the mechanical movement of the stage with these devices, in the charge particle apparatus.
JP50135999A 1975-11-12 1975-11-12 Charge particle beam apparatus Pending JPS5260074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50135999A JPS5260074A (en) 1975-11-12 1975-11-12 Charge particle beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50135999A JPS5260074A (en) 1975-11-12 1975-11-12 Charge particle beam apparatus

Publications (1)

Publication Number Publication Date
JPS5260074A true JPS5260074A (en) 1977-05-18

Family

ID=15164817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50135999A Pending JPS5260074A (en) 1975-11-12 1975-11-12 Charge particle beam apparatus

Country Status (1)

Country Link
JP (1) JPS5260074A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461563U (en) * 1977-10-11 1979-04-28
JPS6458442A (en) * 1987-08-31 1989-03-06 Toshiba Corp Correction of yawing of xy-stage
JPH06501590A (en) * 1990-07-23 1994-02-17 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン High precision, high flexibility energy beam processing system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5461563U (en) * 1977-10-11 1979-04-28
JPS6458442A (en) * 1987-08-31 1989-03-06 Toshiba Corp Correction of yawing of xy-stage
JPH06501590A (en) * 1990-07-23 1994-02-17 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン High precision, high flexibility energy beam processing system

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