JPS5260423A - High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus - Google Patents

High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus

Info

Publication number
JPS5260423A
JPS5260423A JP13623675A JP13623675A JPS5260423A JP S5260423 A JPS5260423 A JP S5260423A JP 13623675 A JP13623675 A JP 13623675A JP 13623675 A JP13623675 A JP 13623675A JP S5260423 A JPS5260423 A JP S5260423A
Authority
JP
Japan
Prior art keywords
intermediade
vaccum
chamber type
tight seal
type ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13623675A
Other languages
Japanese (ja)
Inventor
Minoru Hiroki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13623675A priority Critical patent/JPS5260423A/en
Publication of JPS5260423A publication Critical patent/JPS5260423A/en
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)
  • Sealing Devices (AREA)

Abstract

PURPOSE: Provision of high-vacuum intermediate-chamber type ultra high-vacuum gastight sealing apparatus using rubber packings which is inexpensive in manufacture and easy in assembly.
COPYRIGHT: (C)1977,JPO&Japio
JP13623675A 1975-11-14 1975-11-14 High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus Pending JPS5260423A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13623675A JPS5260423A (en) 1975-11-14 1975-11-14 High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13623675A JPS5260423A (en) 1975-11-14 1975-11-14 High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus

Publications (1)

Publication Number Publication Date
JPS5260423A true JPS5260423A (en) 1977-05-18

Family

ID=15170455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13623675A Pending JPS5260423A (en) 1975-11-14 1975-11-14 High-vaccum intermediade-chamber type ultra high-vacuum gas tight seal ing apparatus

Country Status (1)

Country Link
JP (1) JPS5260423A (en)

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