JPS5261966A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5261966A
JPS5261966A JP50138460A JP13846075A JPS5261966A JP S5261966 A JPS5261966 A JP S5261966A JP 50138460 A JP50138460 A JP 50138460A JP 13846075 A JP13846075 A JP 13846075A JP S5261966 A JPS5261966 A JP S5261966A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
liquid
coat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50138460A
Other languages
English (en)
Other versions
JPS5837689B2 (ja
Inventor
Okimitsu Yasuda
Shoji Tsuburaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50138460A priority Critical patent/JPS5837689B2/ja
Publication of JPS5261966A publication Critical patent/JPS5261966A/ja
Publication of JPS5837689B2 publication Critical patent/JPS5837689B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50138460A 1975-11-18 1975-11-18 ハンドウタイソウチノセイゾウホウホウ Expired JPS5837689B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50138460A JPS5837689B2 (ja) 1975-11-18 1975-11-18 ハンドウタイソウチノセイゾウホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50138460A JPS5837689B2 (ja) 1975-11-18 1975-11-18 ハンドウタイソウチノセイゾウホウホウ

Publications (2)

Publication Number Publication Date
JPS5261966A true JPS5261966A (en) 1977-05-21
JPS5837689B2 JPS5837689B2 (ja) 1983-08-18

Family

ID=15222530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50138460A Expired JPS5837689B2 (ja) 1975-11-18 1975-11-18 ハンドウタイソウチノセイゾウホウホウ

Country Status (1)

Country Link
JP (1) JPS5837689B2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018174090A1 (ja) * 2017-03-22 2018-09-27 ソニーセミコンダクタソリューションズ株式会社 撮像装置及び信号処理装置

Also Published As

Publication number Publication date
JPS5837689B2 (ja) 1983-08-18

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