JPS5264268A - Thermally electron emitting cathode structure - Google Patents

Thermally electron emitting cathode structure

Info

Publication number
JPS5264268A
JPS5264268A JP13990175A JP13990175A JPS5264268A JP S5264268 A JPS5264268 A JP S5264268A JP 13990175 A JP13990175 A JP 13990175A JP 13990175 A JP13990175 A JP 13990175A JP S5264268 A JPS5264268 A JP S5264268A
Authority
JP
Japan
Prior art keywords
thermally
electron emitting
cathode structure
emitting cathode
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13990175A
Other languages
Japanese (ja)
Other versions
JPS5630930B2 (en
Inventor
Hideo Hiraoka
Shiyuuzou Watanabe
Masaji Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP13990175A priority Critical patent/JPS5264268A/en
Publication of JPS5264268A publication Critical patent/JPS5264268A/en
Publication of JPS5630930B2 publication Critical patent/JPS5630930B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Solid Thermionic Cathode (AREA)
JP13990175A 1975-11-21 1975-11-21 Thermally electron emitting cathode structure Granted JPS5264268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13990175A JPS5264268A (en) 1975-11-21 1975-11-21 Thermally electron emitting cathode structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13990175A JPS5264268A (en) 1975-11-21 1975-11-21 Thermally electron emitting cathode structure

Publications (2)

Publication Number Publication Date
JPS5264268A true JPS5264268A (en) 1977-05-27
JPS5630930B2 JPS5630930B2 (en) 1981-07-17

Family

ID=15256247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13990175A Granted JPS5264268A (en) 1975-11-21 1975-11-21 Thermally electron emitting cathode structure

Country Status (1)

Country Link
JP (1) JPS5264268A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451466A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Direct heated thermionic emission cathode
JPS5451469A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Thermionic emission cathode
US12525420B2 (en) 2020-03-24 2026-01-13 Fei Company Charged particle beam source

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6636472B2 (en) 2017-02-28 2020-01-29 株式会社日立ハイテクノロジーズ Electron source and electron beam device using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451466A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Direct heated thermionic emission cathode
JPS5451469A (en) * 1977-09-30 1979-04-23 Denki Kagaku Kogyo Kk Thermionic emission cathode
US12525420B2 (en) 2020-03-24 2026-01-13 Fei Company Charged particle beam source

Also Published As

Publication number Publication date
JPS5630930B2 (en) 1981-07-17

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