JPS5264882A - Method of producing complementary transistor - Google Patents

Method of producing complementary transistor

Info

Publication number
JPS5264882A
JPS5264882A JP51128423A JP12842376A JPS5264882A JP S5264882 A JPS5264882 A JP S5264882A JP 51128423 A JP51128423 A JP 51128423A JP 12842376 A JP12842376 A JP 12842376A JP S5264882 A JPS5264882 A JP S5264882A
Authority
JP
Japan
Prior art keywords
complementary transistor
producing complementary
producing
transistor
complementary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51128423A
Other languages
Japanese (ja)
Inventor
Anteipobu Igoo
Shii Karuhoon Harii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS5264882A publication Critical patent/JPS5264882A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/63Combinations of vertical and lateral BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0112Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0119Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs
    • H10D84/0121Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including complementary BJTs the complementary BJTs being vertical BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/15Diffusion of dopants within, into or out of semiconductor bodies or layers from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • H10W10/031Manufacture or treatment of isolation regions comprising PN junctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/30Isolation regions comprising PN junctions

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
JP51128423A 1975-11-24 1976-10-27 Method of producing complementary transistor Pending JPS5264882A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63496475A 1975-11-24 1975-11-24

Publications (1)

Publication Number Publication Date
JPS5264882A true JPS5264882A (en) 1977-05-28

Family

ID=24545858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51128423A Pending JPS5264882A (en) 1975-11-24 1976-10-27 Method of producing complementary transistor

Country Status (5)

Country Link
JP (1) JPS5264882A (en)
CA (1) CA1053376A (en)
DE (1) DE2651449A1 (en)
FR (1) FR2347777A1 (en)
IT (1) IT1070023B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571256A (en) * 1980-05-05 1982-01-06 Ibm Integrated circuit

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4196440A (en) * 1978-05-25 1980-04-01 International Business Machines Corporation Lateral PNP or NPN with a high gain
FR2457564A1 (en) * 1979-05-23 1980-12-19 Thomson Csf Bipolar integrated circuit pnp transistor - has p-type substrate with p-implantation zones and n-type epitaxial layer
US5279987A (en) * 1991-10-31 1994-01-18 International Business Machines Corporation Fabricating planar complementary patterned subcollectors with silicon epitaxial layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571256A (en) * 1980-05-05 1982-01-06 Ibm Integrated circuit

Also Published As

Publication number Publication date
CA1053376A (en) 1979-04-24
IT1070023B (en) 1985-03-25
DE2651449A1 (en) 1977-05-26
FR2347777A1 (en) 1977-11-04

Similar Documents

Publication Publication Date Title
CS188263B2 (en) Method of producing new biphenyloxyderivatives
CS189737B2 (en) Method of producing new trichlormethylamidines
CS192570B2 (en) Method of producing benzisothiazolones
CS188132B2 (en) Method of producing novel substituted n-benzylthioureas
CS188131B2 (en) Method of producing novel o-hydroxybutyrophenone derivatives
JPS5269277A (en) Method of producing planar transistor
JPS51146407A (en) Method of producing 22aminoonnbutanol
CS194763B2 (en) Method of producing rifamycine compounds
JPS5253807A (en) Method of producing 22aminoo11alcohol
JPS5264882A (en) Method of producing complementary transistor
JPS51138618A (en) Method of producing iminodiacetonitlile
CS186748B2 (en) Method of producing novel derivatives of iso-indoline
SU1187717A3 (en) Method of producing 2-oxo-azetidine compounds
JPS5415668A (en) Method of producing semiconductor
JPS5257038A (en) Production method of electrocastings
JPS5214609A (en) Method of producing moldings
CH612117A5 (en) Method of producing sawn-timber elements
JPS5250560A (en) Method of forming throughhhole
JPS5236616A (en) Method of producing 22chloroalkanal
JPS51128936A (en) Novel method of producing salycylaniride
JPS5284187A (en) Method of producing snowwmelting agents
PT65883B (en) Method of producing 5-fluouracil derivatives
JPS5259924A (en) Method of making pillar
JPS5251066A (en) Method of producing pidan
JPS5221360A (en) Method of producing eggroll