JPS5266837A - Spattering device - Google Patents

Spattering device

Info

Publication number
JPS5266837A
JPS5266837A JP12908075A JP12908075A JPS5266837A JP S5266837 A JPS5266837 A JP S5266837A JP 12908075 A JP12908075 A JP 12908075A JP 12908075 A JP12908075 A JP 12908075A JP S5266837 A JPS5266837 A JP S5266837A
Authority
JP
Japan
Prior art keywords
spattering device
spattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12908075A
Other languages
Japanese (ja)
Other versions
JPS556707B2 (en
Inventor
Takashi Misumi
Naokichi Hosokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDEN VARIAN KK
Original Assignee
NICHIDEN VARIAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDEN VARIAN KK filed Critical NICHIDEN VARIAN KK
Priority to JP12908075A priority Critical patent/JPS5266837A/en
Publication of JPS5266837A publication Critical patent/JPS5266837A/en
Publication of JPS556707B2 publication Critical patent/JPS556707B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12908075A 1975-10-27 1975-10-27 Spattering device Granted JPS5266837A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12908075A JPS5266837A (en) 1975-10-27 1975-10-27 Spattering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12908075A JPS5266837A (en) 1975-10-27 1975-10-27 Spattering device

Publications (2)

Publication Number Publication Date
JPS5266837A true JPS5266837A (en) 1977-06-02
JPS556707B2 JPS556707B2 (en) 1980-02-19

Family

ID=15000573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12908075A Granted JPS5266837A (en) 1975-10-27 1975-10-27 Spattering device

Country Status (1)

Country Link
JP (1) JPS5266837A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528386A (en) * 1978-08-21 1980-02-28 Vac Tec Syst Magnetron sputter apparatus
JPS59177373A (en) * 1983-03-25 1984-10-08 Matsushita Electric Ind Co Ltd Magnetron sputtering device
JPS6059067A (en) * 1983-08-17 1985-04-05 シヤタープルーフ・グラス・コーポレーシヨン Cathode sputtering device
JPS63157866A (en) * 1986-08-26 1988-06-30 Mitsubishi Kasei Corp Magnetron sputtering apparatus
JPH01104770A (en) * 1987-07-24 1989-04-21 Miba Gleitlager Ag Arrangement of rod-shaped magnetoelectric pipe or sputter cathode, sputtering method, apparatus for performing said method and tubular target

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042578A (en) * 1984-07-09 1985-03-06 松下冷機株式会社 Voice generator for refrigerator, etc.
JPS6042579A (en) * 1984-07-09 1985-03-06 松下冷機株式会社 Voice generator for completion of ice making of refrigerator
JPS6042577A (en) * 1984-07-09 1985-03-06 松下冷機株式会社 Voice generator for refrigerator, etc.
JPS6042576A (en) * 1984-07-09 1985-03-06 松下冷機株式会社 Refrigerator with voice generator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528386A (en) * 1978-08-21 1980-02-28 Vac Tec Syst Magnetron sputter apparatus
JPS59177373A (en) * 1983-03-25 1984-10-08 Matsushita Electric Ind Co Ltd Magnetron sputtering device
JPS6059067A (en) * 1983-08-17 1985-04-05 シヤタープルーフ・グラス・コーポレーシヨン Cathode sputtering device
JPS63157866A (en) * 1986-08-26 1988-06-30 Mitsubishi Kasei Corp Magnetron sputtering apparatus
JPH01104770A (en) * 1987-07-24 1989-04-21 Miba Gleitlager Ag Arrangement of rod-shaped magnetoelectric pipe or sputter cathode, sputtering method, apparatus for performing said method and tubular target

Also Published As

Publication number Publication date
JPS556707B2 (en) 1980-02-19

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