JPS5267584A - Semiconductor diaphragm - Google Patents

Semiconductor diaphragm

Info

Publication number
JPS5267584A
JPS5267584A JP50142938A JP14293875A JPS5267584A JP S5267584 A JPS5267584 A JP S5267584A JP 50142938 A JP50142938 A JP 50142938A JP 14293875 A JP14293875 A JP 14293875A JP S5267584 A JPS5267584 A JP S5267584A
Authority
JP
Japan
Prior art keywords
semiconductor diaphragm
distortion
sensitivity
improving
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50142938A
Other languages
Japanese (ja)
Inventor
Satoshi Shimada
Yasumasa Matsuda
Kazuji Yamada
Toru Sugawara
Kosuke Nakamura
Kazumichi Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50142938A priority Critical patent/JPS5267584A/en
Publication of JPS5267584A publication Critical patent/JPS5267584A/en
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)

Abstract

PURPOSE: To improve precision and increase distortion output signal through improving the sensitivity of the distortion producing part by providing a thick fixed part and a thin and even distorting part to a semiconductor diaphragm to be used for a pressure to electric signal convertor device.
COPYRIGHT: (C)1977,JPO&Japio
JP50142938A 1975-12-03 1975-12-03 Semiconductor diaphragm Pending JPS5267584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50142938A JPS5267584A (en) 1975-12-03 1975-12-03 Semiconductor diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50142938A JPS5267584A (en) 1975-12-03 1975-12-03 Semiconductor diaphragm

Publications (1)

Publication Number Publication Date
JPS5267584A true JPS5267584A (en) 1977-06-04

Family

ID=15327125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50142938A Pending JPS5267584A (en) 1975-12-03 1975-12-03 Semiconductor diaphragm

Country Status (1)

Country Link
JP (1) JPS5267584A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546876U (en) * 1977-06-17 1979-01-17
JPS58169979A (en) * 1982-03-31 1983-10-06 Toshiba Corp Diaphragm working device
US4622098A (en) * 1982-10-27 1986-11-11 Tokyo Shibaura Denki Kabushiki Kaisha Method for manufacturing semiconductor strain sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546876U (en) * 1977-06-17 1979-01-17
JPS58169979A (en) * 1982-03-31 1983-10-06 Toshiba Corp Diaphragm working device
US4622098A (en) * 1982-10-27 1986-11-11 Tokyo Shibaura Denki Kabushiki Kaisha Method for manufacturing semiconductor strain sensor

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