JPS52736A - Method of forming fine patterns - Google Patents

Method of forming fine patterns

Info

Publication number
JPS52736A
JPS52736A JP7860975A JP7860975A JPS52736A JP S52736 A JPS52736 A JP S52736A JP 7860975 A JP7860975 A JP 7860975A JP 7860975 A JP7860975 A JP 7860975A JP S52736 A JPS52736 A JP S52736A
Authority
JP
Japan
Prior art keywords
fine patterns
forming fine
patterns
forming
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7860975A
Other languages
Japanese (ja)
Other versions
JPS5418973B2 (en
Inventor
Torikazu Tsumita
Masaki Takahashi
Hideki Nishida
Kouji Yamada
Yutaka Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP7860975A priority Critical patent/JPS52736A/en
Publication of JPS52736A publication Critical patent/JPS52736A/en
Publication of JPS5418973B2 publication Critical patent/JPS5418973B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP7860975A 1975-06-23 1975-06-23 Method of forming fine patterns Granted JPS52736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7860975A JPS52736A (en) 1975-06-23 1975-06-23 Method of forming fine patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7860975A JPS52736A (en) 1975-06-23 1975-06-23 Method of forming fine patterns

Publications (2)

Publication Number Publication Date
JPS52736A true JPS52736A (en) 1977-01-06
JPS5418973B2 JPS5418973B2 (en) 1979-07-11

Family

ID=13666611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7860975A Granted JPS52736A (en) 1975-06-23 1975-06-23 Method of forming fine patterns

Country Status (1)

Country Link
JP (1) JPS52736A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133464A (en) * 1980-03-25 1981-10-19 Chiyou Lsi Gijutsu Kenkyu Kumiai Etching method
JPS6055694A (en) * 1983-09-07 1985-03-30 株式会社日立製作所 Surface treatment method
US4642958A (en) * 1982-05-03 1987-02-17 Pewitt Bernard B Ventilated wall and roofing system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133464A (en) * 1980-03-25 1981-10-19 Chiyou Lsi Gijutsu Kenkyu Kumiai Etching method
US4642958A (en) * 1982-05-03 1987-02-17 Pewitt Bernard B Ventilated wall and roofing system
JPS6055694A (en) * 1983-09-07 1985-03-30 株式会社日立製作所 Surface treatment method

Also Published As

Publication number Publication date
JPS5418973B2 (en) 1979-07-11

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