JPS5276231A - Production method of ultraathin metallic film having island structure - Google Patents

Production method of ultraathin metallic film having island structure

Info

Publication number
JPS5276231A
JPS5276231A JP15314475A JP15314475A JPS5276231A JP S5276231 A JPS5276231 A JP S5276231A JP 15314475 A JP15314475 A JP 15314475A JP 15314475 A JP15314475 A JP 15314475A JP S5276231 A JPS5276231 A JP S5276231A
Authority
JP
Japan
Prior art keywords
ultraathin
production method
metallic film
island structure
island
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15314475A
Other languages
Japanese (ja)
Inventor
Sougo Okamura
Kouichi Ichiji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tokyo NUC
Original Assignee
University of Tokyo NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tokyo NUC filed Critical University of Tokyo NUC
Priority to JP15314475A priority Critical patent/JPS5276231A/en
Publication of JPS5276231A publication Critical patent/JPS5276231A/en
Pending legal-status Critical Current

Links

JP15314475A 1975-12-22 1975-12-22 Production method of ultraathin metallic film having island structure Pending JPS5276231A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15314475A JPS5276231A (en) 1975-12-22 1975-12-22 Production method of ultraathin metallic film having island structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15314475A JPS5276231A (en) 1975-12-22 1975-12-22 Production method of ultraathin metallic film having island structure

Publications (1)

Publication Number Publication Date
JPS5276231A true JPS5276231A (en) 1977-06-27

Family

ID=15555966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15314475A Pending JPS5276231A (en) 1975-12-22 1975-12-22 Production method of ultraathin metallic film having island structure

Country Status (1)

Country Link
JP (1) JPS5276231A (en)

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