JPS5277591A - Pattern tracer - Google Patents

Pattern tracer

Info

Publication number
JPS5277591A
JPS5277591A JP51153262A JP15326276A JPS5277591A JP S5277591 A JPS5277591 A JP S5277591A JP 51153262 A JP51153262 A JP 51153262A JP 15326276 A JP15326276 A JP 15326276A JP S5277591 A JPS5277591 A JP S5277591A
Authority
JP
Japan
Prior art keywords
pattern tracer
tracer
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51153262A
Other languages
English (en)
Inventor
Shiriru Muutouu Pooru
Arun Mishieru
Ru Buru Serujiyu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of JPS5277591A publication Critical patent/JPS5277591A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Liquid Crystal (AREA)
  • Image Input (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP51153262A 1975-12-19 1976-12-20 Pattern tracer Pending JPS5277591A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7539184A FR2335876A1 (fr) 1975-12-19 1975-12-19 Traceur de dessins fonctionnant par voie optique

Publications (1)

Publication Number Publication Date
JPS5277591A true JPS5277591A (en) 1977-06-30

Family

ID=9163986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51153262A Pending JPS5277591A (en) 1975-12-19 1976-12-20 Pattern tracer

Country Status (5)

Country Link
US (1) US4097142A (ja)
JP (1) JPS5277591A (ja)
DE (1) DE2656679A1 (ja)
FR (1) FR2335876A1 (ja)
GB (1) GB1543398A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0529193A (ja) * 1991-10-04 1993-02-05 Hitachi Ltd 紫外パルスレーザによる投影式露光方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3109597C2 (de) * 1981-03-13 1983-10-13 W.C. Heraeus Gmbh, 6450 Hanau Vorlagenbeleuchtungseinrichtung
JPS5990929A (ja) * 1982-11-17 1984-05-25 Canon Inc 投影露光装置のピント合わせ方法
GB2131964A (en) * 1982-12-10 1984-06-27 Letraset International Ltd Exposing through an LCD
US4606610A (en) * 1984-05-03 1986-08-19 Energy Conversion Devices, Inc. Imaging system using tellurium-based energy sensitive sheet and variable image displaying means
JPS6265057A (ja) * 1985-09-16 1987-03-24 ゼロツクス　コ−ポレ−シヨン 合成画像形成装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH492572A (de) * 1968-08-19 1970-06-30 Conradi G Ag Automatische Zeichenmaschine mit einem Schreibkopf zur Lichtstrahlregistrierung
US3584949A (en) * 1968-12-04 1971-06-15 Richard G Clow Optical computing apparatus and method
US3573849A (en) * 1969-02-04 1971-04-06 Bell Telephone Labor Inc Pattern generating apparatus
US3704946A (en) * 1969-02-20 1972-12-05 Opt Omechanisms Inc Microcircuit art generating means
DE2134144A1 (de) * 1970-07-09 1972-01-20 Thomson Csf Opto-elektrisches Schreibsystem zur Herstellung von Mikroschaltungen
US3764211A (en) * 1972-08-25 1973-10-09 Eastman Kodak Co Display system capable of selective annotation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0529193A (ja) * 1991-10-04 1993-02-05 Hitachi Ltd 紫外パルスレーザによる投影式露光方法

Also Published As

Publication number Publication date
FR2335876B1 (ja) 1980-03-21
US4097142A (en) 1978-06-27
FR2335876A1 (fr) 1977-07-15
GB1543398A (en) 1979-04-04
DE2656679A1 (de) 1977-06-30

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