JPS5286576A - Particle pump for gas centrifugation - Google Patents

Particle pump for gas centrifugation

Info

Publication number
JPS5286576A
JPS5286576A JP363776A JP363776A JPS5286576A JP S5286576 A JPS5286576 A JP S5286576A JP 363776 A JP363776 A JP 363776A JP 363776 A JP363776 A JP 363776A JP S5286576 A JPS5286576 A JP S5286576A
Authority
JP
Japan
Prior art keywords
particle pump
gas centrifugation
centrifugation
gas
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP363776A
Other languages
Japanese (ja)
Inventor
Takao Koyama
Hisao Otsuka
Sanpei Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP363776A priority Critical patent/JPS5286576A/en
Publication of JPS5286576A publication Critical patent/JPS5286576A/en
Pending legal-status Critical Current

Links

Landscapes

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Abstract

PURPOSE: To prevent a windage loss and a damage of the side wall of a rotating body of a particle pump by keeping a clearance almost uniform to an axis direction during a run of the particle pump for a gas centrifugation.
COPYRIGHT: (C)1977,JPO&Japio
JP363776A 1976-01-14 1976-01-14 Particle pump for gas centrifugation Pending JPS5286576A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP363776A JPS5286576A (en) 1976-01-14 1976-01-14 Particle pump for gas centrifugation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP363776A JPS5286576A (en) 1976-01-14 1976-01-14 Particle pump for gas centrifugation

Publications (1)

Publication Number Publication Date
JPS5286576A true JPS5286576A (en) 1977-07-19

Family

ID=11562986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP363776A Pending JPS5286576A (en) 1976-01-14 1976-01-14 Particle pump for gas centrifugation

Country Status (1)

Country Link
JP (1) JPS5286576A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0191096U (en) * 1987-12-07 1989-06-15
WO2012077411A1 (en) * 2010-12-10 2012-06-14 エドワーズ株式会社 Vacuum pump
EP2722527A4 (en) * 2011-06-17 2014-12-17 Edwards Japan Ltd VACUUM PUMP AND ROTOR
EP3524821A4 (en) * 2016-08-30 2020-07-22 Edwards Japan Limited VACUUM PUMP AND ROTATING CYLINDRICAL BODY INSTALLED IN A VACUUM PUMP

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0191096U (en) * 1987-12-07 1989-06-15
WO2012077411A1 (en) * 2010-12-10 2012-06-14 エドワーズ株式会社 Vacuum pump
US9453510B2 (en) 2010-12-10 2016-09-27 Edwards Japan Limited Vacuum pump
EP2650544A4 (en) * 2010-12-10 2018-04-11 Edwards Japan Limited Vacuum pump
EP2722527A4 (en) * 2011-06-17 2014-12-17 Edwards Japan Ltd VACUUM PUMP AND ROTOR
US10190597B2 (en) 2011-06-17 2019-01-29 Edwards Japan Limited Vacuum pump and rotor thereof
EP3524821A4 (en) * 2016-08-30 2020-07-22 Edwards Japan Limited VACUUM PUMP AND ROTATING CYLINDRICAL BODY INSTALLED IN A VACUUM PUMP
US11078925B2 (en) 2016-08-30 2021-08-03 Edwards Japan Limited Vacuum pump and rotating cylindrical body included in vacuum pump

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