JPS5288085A - Defect detection system - Google Patents

Defect detection system

Info

Publication number
JPS5288085A
JPS5288085A JP419676A JP419676A JPS5288085A JP S5288085 A JPS5288085 A JP S5288085A JP 419676 A JP419676 A JP 419676A JP 419676 A JP419676 A JP 419676A JP S5288085 A JPS5288085 A JP S5288085A
Authority
JP
Japan
Prior art keywords
detection system
defect detection
lights
transparent film
radiating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP419676A
Other languages
Japanese (ja)
Other versions
JPS618383B2 (en
Inventor
Minokichi Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP419676A priority Critical patent/JPS5288085A/en
Publication of JPS5288085A publication Critical patent/JPS5288085A/en
Publication of JPS618383B2 publication Critical patent/JPS618383B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:Defects of a transparent film or an object coated with a transparent film is detected by radiating the same part of the object with more than two coherent lights (laser lights or lights of mercury lamps) of varying wavelengths or incident angles.
JP419676A 1976-01-17 1976-01-17 Defect detection system Granted JPS5288085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP419676A JPS5288085A (en) 1976-01-17 1976-01-17 Defect detection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP419676A JPS5288085A (en) 1976-01-17 1976-01-17 Defect detection system

Publications (2)

Publication Number Publication Date
JPS5288085A true JPS5288085A (en) 1977-07-22
JPS618383B2 JPS618383B2 (en) 1986-03-13

Family

ID=11577915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP419676A Granted JPS5288085A (en) 1976-01-17 1976-01-17 Defect detection system

Country Status (1)

Country Link
JP (1) JPS5288085A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643539A (en) * 1979-09-19 1981-04-22 Hitachi Ltd Defect inspection device of face plate
JPS60136312A (en) * 1983-12-26 1985-07-19 Hitachi Ltd Method and equipment for semiconductor exposure
JPH02189447A (en) * 1989-01-18 1990-07-25 Nippon Columbia Co Ltd Inspecting method of defect of substrate surface and illuminating device
JP2004205214A (en) * 2002-12-20 2004-07-22 Topcon Corp Surface inspection method and device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643539A (en) * 1979-09-19 1981-04-22 Hitachi Ltd Defect inspection device of face plate
JPS60136312A (en) * 1983-12-26 1985-07-19 Hitachi Ltd Method and equipment for semiconductor exposure
JPH02189447A (en) * 1989-01-18 1990-07-25 Nippon Columbia Co Ltd Inspecting method of defect of substrate surface and illuminating device
JP2004205214A (en) * 2002-12-20 2004-07-22 Topcon Corp Surface inspection method and device
EP1431752A3 (en) * 2002-12-20 2004-11-03 Kabushiki Kaisha Topcon Method and device for surface inspection
KR101199082B1 (en) 2002-12-20 2012-11-07 가부시키가이샤 토프콘 Method and Device for surface inspection

Also Published As

Publication number Publication date
JPS618383B2 (en) 1986-03-13

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