JPS5291651A - Alignment for exposure mask - Google Patents

Alignment for exposure mask

Info

Publication number
JPS5291651A
JPS5291651A JP813476A JP813476A JPS5291651A JP S5291651 A JPS5291651 A JP S5291651A JP 813476 A JP813476 A JP 813476A JP 813476 A JP813476 A JP 813476A JP S5291651 A JPS5291651 A JP S5291651A
Authority
JP
Japan
Prior art keywords
alignment
exposure mask
mask
clearer
profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP813476A
Other languages
Japanese (ja)
Inventor
Makoto Nakase
Nobuji Tsuchiya
Toshiaki Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP813476A priority Critical patent/JPS5291651A/en
Publication of JPS5291651A publication Critical patent/JPS5291651A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To perform mask alignment at a high accuracy by applying light from the rear surface of a transparent wafer and observing transmission light therethrough to make the profile of a mask clearer.
COPYRIGHT: (C)1977,JPO&Japio
JP813476A 1976-01-28 1976-01-28 Alignment for exposure mask Pending JPS5291651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP813476A JPS5291651A (en) 1976-01-28 1976-01-28 Alignment for exposure mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP813476A JPS5291651A (en) 1976-01-28 1976-01-28 Alignment for exposure mask

Publications (1)

Publication Number Publication Date
JPS5291651A true JPS5291651A (en) 1977-08-02

Family

ID=11684807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP813476A Pending JPS5291651A (en) 1976-01-28 1976-01-28 Alignment for exposure mask

Country Status (1)

Country Link
JP (1) JPS5291651A (en)

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