JPS529647A - Dry etching method - Google Patents

Dry etching method

Info

Publication number
JPS529647A
JPS529647A JP8629875A JP8629875A JPS529647A JP S529647 A JPS529647 A JP S529647A JP 8629875 A JP8629875 A JP 8629875A JP 8629875 A JP8629875 A JP 8629875A JP S529647 A JPS529647 A JP S529647A
Authority
JP
Japan
Prior art keywords
dry etching
etching method
dry
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8629875A
Other languages
Japanese (ja)
Other versions
JPS5812338B2 (en
Inventor
Susumu Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP8629875A priority Critical patent/JPS5812338B2/en
Publication of JPS529647A publication Critical patent/JPS529647A/en
Publication of JPS5812338B2 publication Critical patent/JPS5812338B2/en
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP8629875A 1975-07-15 1975-07-15 Dry etching process Expired JPS5812338B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8629875A JPS5812338B2 (en) 1975-07-15 1975-07-15 Dry etching process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8629875A JPS5812338B2 (en) 1975-07-15 1975-07-15 Dry etching process

Publications (2)

Publication Number Publication Date
JPS529647A true JPS529647A (en) 1977-01-25
JPS5812338B2 JPS5812338B2 (en) 1983-03-08

Family

ID=13882916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8629875A Expired JPS5812338B2 (en) 1975-07-15 1975-07-15 Dry etching process

Country Status (1)

Country Link
JP (1) JPS5812338B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4390394A (en) * 1981-01-27 1983-06-28 Siemens Aktiengesellschaft Method of structuring with metal oxide masks by reactive ion-beam etching

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4390394A (en) * 1981-01-27 1983-06-28 Siemens Aktiengesellschaft Method of structuring with metal oxide masks by reactive ion-beam etching

Also Published As

Publication number Publication date
JPS5812338B2 (en) 1983-03-08

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