JPS5296878A - Manufacture of semiconductor laser element - Google Patents

Manufacture of semiconductor laser element

Info

Publication number
JPS5296878A
JPS5296878A JP1366576A JP1366576A JPS5296878A JP S5296878 A JPS5296878 A JP S5296878A JP 1366576 A JP1366576 A JP 1366576A JP 1366576 A JP1366576 A JP 1366576A JP S5296878 A JPS5296878 A JP S5296878A
Authority
JP
Japan
Prior art keywords
semiconductor laser
laser element
manufacture
diffusion
eliminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1366576A
Other languages
Japanese (ja)
Inventor
Toshiki Hijikata
Jiyunkou Takagi
Tadaaki Inoue
Koji Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1366576A priority Critical patent/JPS5296878A/en
Publication of JPS5296878A publication Critical patent/JPS5296878A/en
Pending legal-status Critical Current

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  • Semiconductor Lasers (AREA)

Abstract

PURPOSE: To reduce the electrode contact resistance of semiconductor laser element, by eliminating the after half anneal process and by introducing P type electrode picking up P+ type GaAs layer forming process thru Zn diffusion after proton radiation.
COPYRIGHT: (C)1977,JPO&Japio
JP1366576A 1976-02-09 1976-02-09 Manufacture of semiconductor laser element Pending JPS5296878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1366576A JPS5296878A (en) 1976-02-09 1976-02-09 Manufacture of semiconductor laser element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1366576A JPS5296878A (en) 1976-02-09 1976-02-09 Manufacture of semiconductor laser element

Publications (1)

Publication Number Publication Date
JPS5296878A true JPS5296878A (en) 1977-08-15

Family

ID=11839485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1366576A Pending JPS5296878A (en) 1976-02-09 1976-02-09 Manufacture of semiconductor laser element

Country Status (1)

Country Link
JP (1) JPS5296878A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53134378A (en) * 1977-03-01 1978-11-22 Western Electric Co Semiconductor and method of forming same
FR2412163A1 (en) * 1977-12-13 1979-07-13 Bosch Gmbh Robert PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR COMPONENT

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936322A (en) * 1974-07-29 1976-02-03 International Business Machines Corporation Method of making a double heterojunction diode laser

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3936322A (en) * 1974-07-29 1976-02-03 International Business Machines Corporation Method of making a double heterojunction diode laser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53134378A (en) * 1977-03-01 1978-11-22 Western Electric Co Semiconductor and method of forming same
FR2412163A1 (en) * 1977-12-13 1979-07-13 Bosch Gmbh Robert PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR COMPONENT

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