JPS5298634A - Method of etching stratified films - Google Patents

Method of etching stratified films

Info

Publication number
JPS5298634A
JPS5298634A JP1485276A JP1485276A JPS5298634A JP S5298634 A JPS5298634 A JP S5298634A JP 1485276 A JP1485276 A JP 1485276A JP 1485276 A JP1485276 A JP 1485276A JP S5298634 A JPS5298634 A JP S5298634A
Authority
JP
Japan
Prior art keywords
etching
stratified films
films
etching stratified
stratified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1485276A
Other languages
Japanese (ja)
Inventor
Ken Tsutsui
Toshio Nakano
Akira Sasano
Haruo Matsumaru
Takeo Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1485276A priority Critical patent/JPS5298634A/en
Publication of JPS5298634A publication Critical patent/JPS5298634A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Circuit Boards (AREA)
  • ing And Chemical Polishing (AREA)
JP1485276A 1976-02-16 1976-02-16 Method of etching stratified films Pending JPS5298634A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1485276A JPS5298634A (en) 1976-02-16 1976-02-16 Method of etching stratified films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1485276A JPS5298634A (en) 1976-02-16 1976-02-16 Method of etching stratified films

Publications (1)

Publication Number Publication Date
JPS5298634A true JPS5298634A (en) 1977-08-18

Family

ID=11872554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1485276A Pending JPS5298634A (en) 1976-02-16 1976-02-16 Method of etching stratified films

Country Status (1)

Country Link
JP (1) JPS5298634A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454360U (en) * 1988-09-07 1989-04-04
JPH01150383A (en) * 1987-12-07 1989-06-13 Mitsutoyo Corp Electrode body for pattern wiring

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01150383A (en) * 1987-12-07 1989-06-13 Mitsutoyo Corp Electrode body for pattern wiring
JPS6454360U (en) * 1988-09-07 1989-04-04

Similar Documents

Publication Publication Date Title
JPS52132688A (en) Method of forming flat thin film
JPS534602A (en) Photoosensitive film for microophotogravure and method of producing same
JPS52141443A (en) Method of etching films
JPS5294361A (en) Method of producing ethyleneevinylalcohol copolymer film
JPS5298634A (en) Method of etching stratified films
JPS531858A (en) Method of forming thin film circuit
JPS5377227A (en) Method of producing heattresistant coating film
JPS52114670A (en) Method of underrcoating of plastic film
JPS52102007A (en) Method of feedint tape
JPS5342264A (en) Method of producing thermoshrinking film
JPS52141444A (en) Method of etching aluminum
JPS52133043A (en) Method of etching aluminum
JPS5328616A (en) Method of etching glasssferrite composite
JPS52137266A (en) Method of sputter etching
JPS52119677A (en) Method of manufacturing electroconductive films
JPS5285035A (en) Method of partially etching semiiconductors
JPS5347462A (en) Method of producing polystyrene film
JPS5314636A (en) Method of forming metallized film
JPS52117057A (en) Method of making multiilayer thin film of semiconductor
JPS52102006A (en) Method of feedint tape
JPS52121933A (en) Method of embanking
JPS5351273A (en) Method of producing thermoshrinking film
JPS5338403A (en) Method of etching resin film
JPS5319315A (en) Method of etching
JPS52143933A (en) Method of formiing antioxidizing spray film