JPS5299065A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5299065A
JPS5299065A JP1565976A JP1565976A JPS5299065A JP S5299065 A JPS5299065 A JP S5299065A JP 1565976 A JP1565976 A JP 1565976A JP 1565976 A JP1565976 A JP 1565976A JP S5299065 A JPS5299065 A JP S5299065A
Authority
JP
Japan
Prior art keywords
semiconductor device
production
producing
heat treatment
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1565976A
Other languages
English (en)
Inventor
Hiroshi Koyama
Takayuki Matsukawa
Satoru Kawazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1565976A priority Critical patent/JPS5299065A/ja
Publication of JPS5299065A publication Critical patent/JPS5299065A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1565976A 1976-02-16 1976-02-16 Production of semiconductor device Pending JPS5299065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565976A JPS5299065A (en) 1976-02-16 1976-02-16 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565976A JPS5299065A (en) 1976-02-16 1976-02-16 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5299065A true JPS5299065A (en) 1977-08-19

Family

ID=11894851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565976A Pending JPS5299065A (en) 1976-02-16 1976-02-16 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5299065A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950531A (ja) * 1982-09-16 1984-03-23 Toshiba Corp 半導体装置及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5042778A (ja) * 1973-08-18 1975-04-18
JPS5051665A (ja) * 1973-09-07 1975-05-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5042778A (ja) * 1973-08-18 1975-04-18
JPS5051665A (ja) * 1973-09-07 1975-05-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5950531A (ja) * 1982-09-16 1984-03-23 Toshiba Corp 半導体装置及びその製造方法

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