JPS53100399A - Power source for ion source - Google Patents

Power source for ion source

Info

Publication number
JPS53100399A
JPS53100399A JP1594477A JP1594477A JPS53100399A JP S53100399 A JPS53100399 A JP S53100399A JP 1594477 A JP1594477 A JP 1594477A JP 1594477 A JP1594477 A JP 1594477A JP S53100399 A JPS53100399 A JP S53100399A
Authority
JP
Japan
Prior art keywords
source
ion
power source
power
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1594477A
Other languages
Japanese (ja)
Inventor
Kazuo Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin High Voltage Co Ltd
Original Assignee
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin High Voltage Co Ltd filed Critical Nissin High Voltage Co Ltd
Priority to JP1594477A priority Critical patent/JPS53100399A/en
Publication of JPS53100399A publication Critical patent/JPS53100399A/en
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1594477A 1977-02-15 1977-02-15 Power source for ion source Pending JPS53100399A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1594477A JPS53100399A (en) 1977-02-15 1977-02-15 Power source for ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1594477A JPS53100399A (en) 1977-02-15 1977-02-15 Power source for ion source

Publications (1)

Publication Number Publication Date
JPS53100399A true JPS53100399A (en) 1978-09-01

Family

ID=11902864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1594477A Pending JPS53100399A (en) 1977-02-15 1977-02-15 Power source for ion source

Country Status (1)

Country Link
JP (1) JPS53100399A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1085602C (en) * 1997-05-30 2002-05-29 住友电木株式会社 Sealed container

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1085602C (en) * 1997-05-30 2002-05-29 住友电木株式会社 Sealed container

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