JPS53108081A - Evaporation apparatus of meatla carbide - Google Patents

Evaporation apparatus of meatla carbide

Info

Publication number
JPS53108081A
JPS53108081A JP2222777A JP2222777A JPS53108081A JP S53108081 A JPS53108081 A JP S53108081A JP 2222777 A JP2222777 A JP 2222777A JP 2222777 A JP2222777 A JP 2222777A JP S53108081 A JPS53108081 A JP S53108081A
Authority
JP
Japan
Prior art keywords
meatla
carbide
evaporation apparatus
substrate
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2222777A
Other languages
Japanese (ja)
Other versions
JPS5548107B2 (en
Inventor
Ensei Ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2222777A priority Critical patent/JPS53108081A/en
Publication of JPS53108081A publication Critical patent/JPS53108081A/en
Publication of JPS5548107B2 publication Critical patent/JPS5548107B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To spread the area of glow discharge to the back of substrate and to improve attaching of film on the substrate, by providing the heater, heating the substrate from the back in treating room and also, connecting operating current source with the above heater and vaporization source.
JP2222777A 1977-03-03 1977-03-03 Evaporation apparatus of meatla carbide Granted JPS53108081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2222777A JPS53108081A (en) 1977-03-03 1977-03-03 Evaporation apparatus of meatla carbide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2222777A JPS53108081A (en) 1977-03-03 1977-03-03 Evaporation apparatus of meatla carbide

Publications (2)

Publication Number Publication Date
JPS53108081A true JPS53108081A (en) 1978-09-20
JPS5548107B2 JPS5548107B2 (en) 1980-12-04

Family

ID=12076906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2222777A Granted JPS53108081A (en) 1977-03-03 1977-03-03 Evaporation apparatus of meatla carbide

Country Status (1)

Country Link
JP (1) JPS53108081A (en)

Also Published As

Publication number Publication date
JPS5548107B2 (en) 1980-12-04

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